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AssigneesSilmach, Centre National de la Recherche Scientifique (CNRS), Universite De Franche-Comte
InventorsThierry Côte, Patrice Minotti, Gilles Bourbon, Patrice Le Moal
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The disclosure relates to a microelectromechanical system comprising a support and an actuator comprising a drive module comprising: a fixed drive portion, mounted fixedly on the support, and comprising a fixed comb with fingers, and a movable drive portion, mounted movably relative to the support, and comprising a movable comb with fingers, a latching mechanism movable between an initial unlatched configuration and a final latched configuration. The movable comb is arranged facing the fixed comb so that when the latching mechanism is in the initial unlatched configuration, the fingers of the movable comb are not engaged between the fingers of the fixed comb, and when the latching mechanism is in the final latched configuration, the fingers of the movable comb are engaged between the fingers of the fixed comb and the latching mechanism prevents disengagement of the fingers of the movable comb from between the fingers of the fixed comb.
A microelectromechanical system, comprising a support and an actuator, the actuator comprising a drive module comprising:
A microelectromechanical system, comprising a support and an actuator, the actuator comprising a drive module comprising:
Dependencies are inferred from the claim text.