Back to results
US 6,091,537 AGranted
Electro-actuated microlens assemblies
AssigneeXerox Corporation
InventorsDecai Sun, Eric Peeters, Ross D. Bringans, Patrick Y. Maeda
Life of this patent
Estimating the term…
Abstract
A micro-machined movable microlens assembly is formed on undoped or pure a semiconductor substrate. The movable microlens assemblies are to be actuated using force generators which cause various mechanical degrees of freedom depending upon the type of stage suspension and actuation used.
Claims20
A micro-machined microlens assembly, comprising:
- a substrate made of semiconductor material;
- a microlens;
- a microlens support which movably supports the microlens;
- at least one suspension member, the at least one suspension member having a first end and a second end, the first end being attached to the microlens support and the second end being attached to the substrate thereby suspending the microlens support above the substrate;
- and
- at least one force generator which moves the microlens support.
3 more elements
An array of micro-machined microlens assemblies, comprising:
- a substrate made of semiconductor material;
- a plurality of microlenses;
- at least one microlens support which movably supports the microlenses;
- a plurality of suspension members, each suspension member having a first end and a second end, the first end of each suspension member being attached to the microlens support and the second end of each suspension member being attached to the substrate thereby suspending the at least one microlens support above the substrate;
- and
- at least one force generator which moves the plurality of microlenses with respect to the substrate.
3 more elements
A method of moving a micro-machined microlens assembly, comprising:
- suspending a microlens assembly on a semiconductor substrate, the microlens assembly being supported on a microlens support;
- and
- actuating a first force generator which moves the microlens support in a first direction;
- and
- actuating a second force generator which moves the microlens support in a second direction.
2 more elements
Dependencies are inferred from the claim text.