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US 2026/0209033 A1Published application
Dual micro-electro mechanical system and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYang-Che CHEN, Yi-Chuan TENG, Victor Chiang LIANG, Chen-Hua LIN, Chwen-Ming LIU, Huang-Wen TSENG
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Abstract
A micro electro mechanical system (MEMS) includes a circuit substrate, a first MEMS structure disposed over the circuit substrate, and a second MEMS structure disposed over the first MEMS structure.
Claims20
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- and
- an insulating layer disposed between the first structure and the substrate,
- wherein the first structure includes a first frame-shaped proof mass supported by at least one first anchor attached to the substrate, and
- the first frame-shaped proof mass includes at least one recess formed in a side of the first proof mass facing the substrate.
3 more elements
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- a second structure disposed over the first structure;
- and
- an insulating layer disposed between the first structure and the second structure,
- wherein the first structure includes a first frame-shaped proof mass supported by at least one first anchor attached to the substrate,
- the second structure includes a second frame-shaped proof mass supported by at least one second anchor attached to the substrate, and
- the second proof mass is connected to the first proof mass by at least one first electrode.
5 more elements
A device, comprising:
- a substrate;
- a first structure disposed over the substrate;
- a second structure disposed over the first structure, and an insulating layer disposed between the first structure and the second structure,
- wherein the first structure comprises:
- a first capacitor including a first comb electrode and a second comb electrode alternately arranged along a first direction;
- a second capacitor including a third comb electrode and a fourth comb electrode alternately arranged along the first direction;
- a third capacitor including a fifth comb electrode and a sixth comb electrode alternately arranged along a second direction crossing the first direction;
- and
- a fourth capacitor including a seventh comb electrode and an eighth comb electrode alternately arranged along the second direction,
- wherein the first capacitor and the second capacitor are arranged at point symmetric positions with respect to a center of the first structure, and
- the third capacitor and the fourth capacitor are arranged at point symmetric positions with respect to the center of the first structure.
8 more elements
Dependencies are inferred from the claim text.