Laterally driven resonant microstructures
AssigneeThe Regents of the University of California
InventorsWilliam C. Tang, Roger T. Howe
Life of this patent
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Abstract
A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.
Claims20
A linear, lateral-drive structure including in combination:
- a substrate,
- a stationary thin-film electrode secured to said substrate and located in a plane thereabove,
- a movable plate overlying said substrate and suspended by flexible supporting arms above said substrate,
- said movable plate and electrode being patterned to provide for each at least one comb with fingers interdigitated with those of the other.
A resonant microstructure for use as a sensor or an actuator, including in combination:
- a silicon substrate,
- a movable plate, suspended above and anchored to such substrate, and
- lateral-drive means for driving said plate electrostatically in a plane parallel to and above said substrate.
A lateral-drive structure including in combination:
- a silicon substrate,
- a stationary electrode secured to and elevated above said substrate comprising a plurality of comb fingers, and
- a movable plate suspended by flexible supporting arms in the same plane as said stationary electrodes and comprising a comb with a plurality of fingers on said stationary electrodes.
Dependencies are inferred from the claim text.