Method for producing a mems converter using a stretching of an actuator material

A method for producing a MEMS transducer for interacting with a volume flow of a fluid comprising

• a carrier
• a vibratable membrane for generating or receiving pressure waves of the fluid in a vertical direction, wherein the vibratable membrane is held by the carrier,
• the vibratable membrane exhibits a meander structure with vertical sections and horizontal sections, wherein the vertical sections are configured substantially parallel to the vertical direction and the horizontal sections connect the vertical sections to one another, and wherein the vibratable membrane comprises at least one actuator layer made of an actuator material and is in contact with at least one electrode, such that the vertical sections can be induced into horizontal vibrations by driving the at least one electrode or such that an electrical signal can be generated at the at least one electrode when the vertical sections are induced to vibrate horizontally wherein the method comprises the following steps:
• a) providing at least one shaping component for configuring the vibratable membrane with the actuator layer in the form of a meander structure,
• b) providing an actuator material comprising polymers, wherein the actuator material is present in the form of a polymer foil or a polymer liquid, and
• c) placing the shaping component in contact with the actuator material for shaping the actuator layer, wherein during the contact between the shaping component and the actuator material, the polymers of the actuator material are aligned and/or stretched such that a dipole moment of the polymers is increased and piezoelectric properties of the actuator material are enhanced.