B81B 2201/032
Bimorph and unimorph actuators
Official title: Bimorph and unimorph actuators, e.g. piezo and thermo
B81B2201/032 (Bimorph and unimorph actuators) appears on 226 US grants and 262 published applications in this corpus.
Search patents in B81B- Granted patents
- 226
- Published applications
- 262
- Assignees
- 160
- Inventors
- 510
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 0 |
| 2002 | 1 | 5 |
| 2003 | 3 | 6 |
| 2004 | 11 | 7 |
| 2005 | 3 | 6 |
| 2006 | 8 | 5 |
| 2007 | 3 | 8 |
| 2008 | 5 | 7 |
| 2009 | 2 | 6 |
| 2010 | 9 | 6 |
| 2011 | 8 | 4 |
| 2012 | 2 | 4 |
| 2013 | 6 | 3 |
| 2014 | 8 | 5 |
| 2015 | 3 | 8 |
| 2016 | 5 | 8 |
| 2017 | 5 | 7 |
| 2018 | 4 | 13 |
| 2019 | 13 | 18 |
| 2020 | 15 | 25 |
| 2021 | 15 | 21 |
| 2022 | 14 | 23 |
| 2023 | 25 | 29 |
| 2024 | 14 | 16 |
| 2025 | 22 | 15 |
| 2026 | 14 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Battery cell and battery device having the same15 Sep 2026US 12,738,590 B2SK On Co., Ltd.
- Resonance device with anti-diffusion layer and resonance device manufacturing method25 Aug 2026US 12,719,443 B2Murata Manufacturing Co., Ltd.
- Piezoelectric micromachined ultrasonic transducer (PMUT) design25 Aug 2026US 12,721,040 B2QUALCOMM Incorporated
- Mems device, nearfield loudspeaker, hearable, mems pump, loudspeaker and method for controlling an mems device18 Aug 2026US 12,709,536 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Microelectromechanical systems device having improved signal distortion30 Jun 2026US 12,668,484 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method for producing a mems converter using a stretching of an actuator material27 Aug 2026US 2026/0255880 A1Hahn-Schickard-Gesellschaft FüR Angewandte Forschung E. V.
- Mems rotating micro actuators9 Jul 2026US 2026/0193078 A1Preciseley Microtechnology Corp.
- Implantable cardiovascular sensor11 Jun 2026US 2026/0157700 A1IP2Ipo Innovations Limited
- Zero Power Micro-Chemomechanical Hydrogen Sensor19 Mar 2026US 2026/0077998 A1Zepsor Technologies, Inc.
- Forming methods of package structure and apparatus12 Mar 2026US 2026/0075366 A1xMEMS Labs, Inc.
Most cited
By later US patents
- Microelectromechanical positioning apparatus83US 5,962,949 AMcnc · 1999
- Electrothermal quadmorph microactuator65US 6,679,055 B1Zyvex Corporation · 2004
- Micromachined electrostatic actuator with air gap59US 6,236,491 B1Mcnc · 2001
- Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film59US 7,758,979 B2Denso Corporation · 2010
- Micro actuator56US 5,489,812 AInternational Business Machines Corporation · 1996