Micro actuator
AssigneeInternational Business Machines Corporation
InventorsTomotake Furuhata, Toshiki Hirano
Life of this patent
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Abstract
A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.
Claims18
A micro actuator using vibration force as its driving force, comprising:
- a substrate;
- a piezo electric element connected to a top surface of said substrate,
- said piezo electric element having at least two electrodes;
- and
- a contact pin connected across said at least two electrodes and extending upwards from a top surface of said piezo electric element.
A micro actuator using Coulomb's force as its driving force, comprising:
- a substrate;
- a cavity in a surface of said substrate;
- at least two electrodes partially obstructing said cavity;
- and
- a contact pin connected across said at least two electrodes and extending upwards therefrom, whereby
- a voltage applied between one of said at least two electrodes and said substrate generates said Coulomb's force there between.
A micro actuator using fluid as its driving force, comprising:
- a substrate;
- an orifice in said substrate;
- deformable means on top of said substrate, at said orifice;
- a wedged shaped valve extending from said deformable means towards said orifice;
- and
- a contact pin extending from said deformable means opposite said wedged shaped valve, wherein
- fluid injected through said orifice against said wedged shaped valve urges said deformable means away from said substrate, thereby forcing said contact pin in an upward motion.
A micro actuator using vibration force as its driving force, comprising:
- a. a substrate;
- b. a piezo electric element connected to said substrate;
- c. at least two electrodes deposited on said piezo electric element;
- and
- d. a contact pin formed across said at least two electrodes.
A micro actuator comprising:
- a substrate;
- driving means connected to said substrate for generating a substantially vertical motion;
- and
- conversion means coupled to said driving means for converting said substantially vertical motion into rotational motion.
Dependencies are inferred from the claim text.