Micromachined electrostatic actuator with air gap

A MEMS electrostatic attenuator of electromagnetic radiation, comprising:

• a source of electromagnetic radiation, wherein the electromagnetic radiation is directed along at least one predetermined path;
• at least one MEMS electrostatic radiation attenuator proximate said radiation path and comprising
• a microelectronic substrate defining a planar surface;
• a substrate electrode forming a layer on the surface of the substrate;
• a flexible composite overlying the substrate electrode and having an electrode layer and a biasing layer, the composite having a fixed portion attached to the underlying surface, a generally stationary medial portion defining a non-increasing air gap between the substrate electrode and the composite electrode, and a distal portion movable with respect to the substrate electrode;
• and
• an insulator electrically separating said substrate electrode from said flexible electrode.

A method of attenuating electromagnetic radiation using an array of MEMS electrostatic attenuators, each having a microelectronic substrate having a substrate electrode, a flexible composite having an electrode layer, the composite having a fixed portion attached to the underlying surface, a generally stationary medial portion defining a non-increasing air gap between the substrate electrode and the composite electrode, and a distal portion movable in response to an electrostatic force generated between said substrate electrode and said electrode layer, the method comprising the steps of:

• directing electromagnetic radiation along at least one predetermined path proximate an array of electrostatic attenuators;
• selectively generating an electrostatic force between said substrate electrode and said electrode layer for at least one selected electrostatic attenuator within the array of electrostatic attenuators;
• and
• moving the flexible composite for the at least one selected electrostatic attenuator within the array of electrostatic attenuators a predetermined distance to selectively obstruct or clear electromagnetic radiation traveling along at least one predetermined path in response to the selective generation of electrostatic force.

A MEMS device driven by electrostatic forces, comprising:

• a microelectronic substrate defining a planar surface;
• a substrate electrode forming a layer on the surface of the substrate;
• a flexible composite overlying the substrate electrode and having an electrode layer and a biasing layer, the composite having a fixed portion attached to the underlying surface, a medial portion defining a generally decreasing air gap between the substrate electrode and the composite electrode, with the air gap being largest proximate the fixed portion and decreasing therefrom, and a distal portion movable with respect to the substrate electrode;
• and
• an insulator electrically separating said substrate electrode from said flexible electrode.

A MEMS device driven by electrostatic forces, comprising:

• a microelectronic substrate defining a planar surface;
• a substrate electrode forming a layer on the surface of the substrate;
• a flexible composite overlying the substrate electrode and having an electrode layer and a biasing layer, the composite having a fixed portion attached to the underlying surface, a medial portion defining a non-increasing air gap between the substrate electrode and the composite electrode, and a distal portion movable with respect to the substrate electrode that curls out of a plane defined by an upper surface of the composite when no electrostatic force is created between the substrate electrode and the composite electrode;
• and
• an insulator electrically separating said substrate electrode from said flexible electrode.

A MEMS electrostatic attenuator of electromagnetic radiation, comprising:

• a source of electromagnetic radiation, wherein the electromagnetic radiation directed along at least one predetermined path;
• at least one MEMS electrostatic radiation attenuator proximate said radiation path and comprising
• a microelectronic substrate defining a planar surface;
• a substrate electrode forming a layer on the surface of the substrate;
• a flexible composite overlying the substrate electrode and having an electrode layer and a biasing layer, the composite having a fixed portion attached to the underlying surface, a medial portion defining a non-increasing air gap between the substrate electrode and the composite electrode, and a distal portion movable with respect to the substrate electrode;
• and
• an insulator electrically separating said substrate electrode from said flexible electrode, wherein said flexible composite blocks the transmission of electromagnetic radiation of the type being attenuated.

A method of attenuating electromagnetic radiation using an array of MEMS electrostatic attenuators, each having a microelectronic substrate having a substrate electrode, a flexible composite having an electrode layer, the flexible composite movable in response to an electrostatic force generated between said substrate electrode and said electrode layer, the method comprising the steps of:

• directing electromagnetic radiation along at least one predetermined path proximate an array of electrostatic attenuators;
• selectively generating an electrostatic force between said substrate electrode and said electrode layer for at least one selected electrostatic attenuator within the array of electrostatic attenuators to thereby activate a subset of the electrostatic attenuators within the array;
• and
• moving the flexible composite for the at least one selected electrostatic attenuator within the array of electrostatic attenuators a predetermined distance to selectively obstruct or clear electromagnetic radiation traveling along at least one predetermined path in response to the selective generation of electrostatic force.