B81B 2203/00
Basic microelectromechanical structures
B81B2203/00 (Basic microelectromechanical structures) appears on 4,210 US grants and 5,110 published applications in this corpus.
Search patents in B81B- Granted patents
- 4,210
- Published applications
- 5,110
- Assignees
- 1,218
- Inventors
- 7,235
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 3 | 0 |
| 1990 | 2 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 3 | 0 |
| 1994 | 5 | 0 |
| 1995 | 5 | 0 |
| 1996 | 17 | 0 |
| 1997 | 13 | 0 |
| 1998 | 22 | 0 |
| 1999 | 27 | 0 |
| 2000 | 35 | 0 |
| 2001 | 43 | 22 |
| 2002 | 63 | 110 |
| 2003 | 80 | 117 |
| 2004 | 115 | 115 |
| 2005 | 88 | 101 |
| 2006 | 83 | 109 |
| 2007 | 73 | 136 |
| 2008 | 61 | 86 |
| 2009 | 68 | 109 |
| 2010 | 90 | 149 |
| 2011 | 97 | 157 |
| 2012 | 97 | 179 |
| 2013 | 153 | 148 |
| 2014 | 178 | 188 |
| 2015 | 169 | 235 |
| 2016 | 200 | 269 |
| 2017 | 237 | 319 |
| 2018 | 229 | 301 |
| 2019 | 293 | 300 |
| 2020 | 303 | 311 |
| 2021 | 242 | 330 |
| 2022 | 224 | 271 |
| 2023 | 253 | 306 |
| 2024 | 234 | 270 |
| 2025 | 239 | 268 |
| 2026 | 161 | 204 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81B 2203/01Suspended structures, i.e. structures allowing a movementIndexing code2,626
- B81B 2203/03Static structuresIndexing code1,706
- B81B 2203/05Type of movementIndexing code758
- B81B 2203/04ElectrodesIndexing code754
- B81B 2203/06Devices comprising elements which are movable in relation to each otherIndexing code43
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- Composite spring structure to reinforce mechanical robustness of a mems device29 Sep 2026US 12,747,153 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Microelectromechanical systems (mems) actuator with magnetic latching and methods for manufacturing and using the same8 Oct 2026US 2026/0307980 A1Atomic Machines, Inc.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging method for mems acoustic device structure, mems acoustic device packaging structure and mems chip packaging method for acoustic device8 Oct 2026US 2026/0307982 A1Hefei Smat Technology Co., Ltd.
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Microelectromechanical device with recovery from stiction conditions1 Oct 2026US 2026/0296874 A1STMicroelectronics International N. V.
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Method for forming micro cavity560US 6,342,427 B12002
- Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials513US 7,115,305 B2California Institute of Technology · 2006
- Bistable microelectromechanical actuator511US 5,867,302 ASandia Corporation · 1999
- Support post architecture for micromechanical devices340US 6,447,126 B1Texas Instruments Incorporated · 2002