Microelectromechanical device with recovery from stiction conditions

Abstract

A microelectromechanical device includes: a support body; a movable mass having a main body constrained to the support body by first flexures to be able to oscillate along a main motion direction, and a plurality of auxiliary bodies constrained to the main body by second flexures. The second flexures are configured to prevent relative movements of the auxiliary bodies with respect to the main body according to the main motion direction at least in an operating frequency band, and to allow relative movements of the auxiliary bodies with respect to the main body according to an actuation degree of freedom in a recovery frequency band higher than the operating frequency band. Recovery electrodes are arranged on the support body and capacitively coupled to the respective auxiliary bodies at least when the movable mass is in a stiction condition.

Dependencies are inferred from the claim text.