Micro-electro-mechanical system and manufacturing method thereof

A micro-electro-mechanical system, comprising:

• a comb tooth structure, comprising a first comb tooth portion and a second comb tooth portion, wherein the first comb tooth portion comprises a plurality of first comb teeth arranged along a first direction and extending along a second direction, the second comb tooth portion comprises a plurality of second comb teeth arranged along the first direction and extending along the second direction, at least part of the plurality of second comb teeth are in intervals of the plurality of first comb teeth so that the plurality of first comb teeth and at least part of the plurality of second comb teeth are arranged alternately, the second comb tooth portion is a suspended structure and configured to be movable in the second direction relative to the first comb tooth portion, and the first direction intersects with the second direction;
• a spring structure, connected to the second comb tooth portion;
• an electrode structure, comprising a first electrode, a second electrode, a first electrode line and a second electrode line, wherein the first electrode is electrically connected to the first comb tooth portion through the first electrode line, and the second electrode is electrically connected to the second comb tooth portion through the second electrode line,
• wherein the second comb tooth portion further comprises a cantilever beam connecting the plurality of second comb teeth, and the cantilever beam is connected to the spring structure;
• a line width of a first comb tooth and a line width of a second comb tooth are both 3-7 microns, both the line width of the first comb tooth and the line width of the second comb tooth are not less than a distance between the first comb tooth and the second comb tooth that are adjacent, a ratio of a length of an overlapping portion of orthographic projections, on a plane, of the first comb tooth and the second comb tooth that are adjacent to a length of the first comb tooth is 5%-50%, a ratio of the length of the first comb tooth to a length of the second comb tooth is 0.7-1.5, a width of the cantilever beam is not less than the line width of the second comb tooth, a thickness of the first comb tooth and a thickness of the second comb tooth are both 300 nanometers to 500 microns, and the plane is parallel to the second direction and perpendicular to the first direction.