B81C 2201/016
Passivation
B81C2201/016 (Passivation) appears on 72 US grants and 90 published applications in this corpus.
Search patents in B81C- Granted patents
- 72
- Published applications
- 90
- Assignees
- 44
- Inventors
- 198
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 0 | 3 |
| 2003 | 3 | 5 |
| 2004 | 5 | 5 |
| 2005 | 4 | 2 |
| 2006 | 0 | 3 |
| 2007 | 2 | 1 |
| 2008 | 2 | 1 |
| 2009 | 0 | 0 |
| 2010 | 1 | 1 |
| 2011 | 3 | 3 |
| 2012 | 2 | 2 |
| 2013 | 0 | 1 |
| 2014 | 2 | 2 |
| 2015 | 2 | 2 |
| 2016 | 3 | 5 |
| 2017 | 4 | 5 |
| 2018 | 3 | 4 |
| 2019 | 5 | 6 |
| 2020 | 4 | 6 |
| 2021 | 3 | 2 |
| 2022 | 5 | 3 |
| 2023 | 5 | 8 |
| 2024 | 5 | 1 |
| 2025 | 4 | 11 |
| 2026 | 2 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Micromechanical arm array for mems actuators8 Sep 2026US 12,729,109 B2Taiwan Semiconductor Manufacturing Company.Ltd
- MEMS device with integrated CMOS circuit8 Sep 2026US 12,729,111 B23C Project Management Limited
- Piezoelectric MEMS microphone with spring region30 Dec 2025US 12,513,470 B2Skyworks Solutions, Inc.
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- MEMS resonator integrated cicruit fabrication22 Jul 2025US 12,365,582 B2SiTime Corporation
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method for manufacturing a microelectromechanical component, and microelectromechanical component1 Oct 2026US 2026/0296882 A1
- Micro-electro-mechanical system package20 Aug 2026US 2026/0242212 A1Vanguard International Semiconductor Corporation
- Capacitive microelectromechanical pressure transducer and related manufacturing process28 May 2026US 2026/0145928 A1STMicroelectronics International N. V.
- Zero Power Micro-Chemomechanical Hydrogen Sensor19 Mar 2026US 2026/0077998 A1Zepsor Technologies, Inc.
Most cited
By later US patents
- Accelerometer sensor of crystalline material and method for manufacturing the same160US 5,578,755 ARobert Bosch GmbH · 1996
- Method for manufacturing a thin film actuated mirror having a flat light reflecting surface32US 5,789,264 ADaewoo Electronics Co., Ltd. · 1998
- Dry etch release of MEMS structures26US 6,666,979 B2APPLIED Materials.Inc. · 2003
- Stacked die package for MEMS resonator system26US 8,022,554 B2SiTime Corporation · 2011
- Method of micromachining a multi-part cavity20US 6,827,869 B22004