B81C 2201/00
Manufacture or treatment of microstructural devices or systems
B81C2201/00 (Manufacture or treatment of microstructural devices or systems) appears on 3,836 US grants and 4,461 published applications in this corpus.
Search patents in B81C- Granted patents
- 3,836
- Published applications
- 4,461
- Assignees
- 1,230
- Inventors
- 7,263
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 3 | 0 |
| 1991 | 3 | 0 |
| 1992 | 2 | 0 |
| 1993 | 6 | 0 |
| 1994 | 8 | 0 |
| 1995 | 10 | 0 |
| 1996 | 18 | 0 |
| 1997 | 20 | 0 |
| 1998 | 32 | 0 |
| 1999 | 31 | 0 |
| 2000 | 55 | 0 |
| 2001 | 57 | 31 |
| 2002 | 77 | 133 |
| 2003 | 94 | 149 |
| 2004 | 135 | 187 |
| 2005 | 112 | 145 |
| 2006 | 101 | 170 |
| 2007 | 114 | 158 |
| 2008 | 107 | 162 |
| 2009 | 79 | 177 |
| 2010 | 151 | 166 |
| 2011 | 107 | 159 |
| 2012 | 122 | 169 |
| 2013 | 150 | 171 |
| 2014 | 172 | 208 |
| 2015 | 192 | 195 |
| 2016 | 197 | 267 |
| 2017 | 220 | 278 |
| 2018 | 229 | 215 |
| 2019 | 243 | 201 |
| 2020 | 202 | 193 |
| 2021 | 159 | 208 |
| 2022 | 142 | 151 |
| 2023 | 147 | 153 |
| 2024 | 136 | 150 |
| 2025 | 112 | 146 |
| 2026 | 82 | 119 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81C 2201/01In or on a substrateIndexing code3,424
- B81C 2201/05Temporary protection of devices or parts of the devices during manufacturingIndexing code248
- B81C 2201/11Treatments for avoiding stiction of elastic or moving parts of memsIndexing code217
- B81C 2201/03Processes for manufacturing substrate-free structuresIndexing code211
Recent patents
- Femtosecond laser surface processing for controlled fill and targeted deposition6 Oct 2026US 12,752,371 B1Honeywell Federal Manufacturing & Technologies, LLC
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- MEMS resonator6 Oct 2026US 12,753,070 B2SiTime Corporation
- Composite spring structure to reinforce mechanical robustness of a mems device29 Sep 2026US 12,747,153 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
- Micro-electro-mechanical system package and fabrication method thereof1 Oct 2026US 2026/0296879 A1Vanguard International Semiconductor Corporation
- Manufacturing a microphone by bonding layers1 Oct 2026US 2026/0296881 A1InvenSense, Inc.
Most cited
By later US patents
- Formation of microstamped patterns on surfaces and derivative articles1,049US 5,512,131 APresident and Fellows of Harvard College · 1996
- Methods and devices for fabricating and assembling printable semiconductor elements883US 7,622,367 B1The Board of Trustees of the University of Illinois · 2009
- Stretchable semiconductor elements and stretchable electrical circuits765US 7,557,367 B2The Board of Trustees of the University of Illinois · 2009
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Microfluidic structure and process for its manufacture704US 5,376,252 APharmacia Biosensor AB · 1994