B81C 2201/11
Treatments for avoiding stiction of elastic or moving parts of mems
Official title: Treatments for avoiding stiction of elastic or moving parts of MEMS
B81C2201/11 (Treatments for avoiding stiction of elastic or moving parts of mems) appears on 217 US grants and 231 published applications in this corpus.
Search patents in B81C- Granted patents
- 217
- Published applications
- 231
- Assignees
- 108
- Inventors
- 481
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 4 | 0 |
| 1996 | 3 | 0 |
| 1997 | 4 | 0 |
| 1998 | 4 | 0 |
| 1999 | 1 | 0 |
| 2000 | 5 | 0 |
| 2001 | 6 | 3 |
| 2002 | 4 | 8 |
| 2003 | 5 | 17 |
| 2004 | 11 | 15 |
| 2005 | 10 | 13 |
| 2006 | 3 | 10 |
| 2007 | 8 | 12 |
| 2008 | 16 | 12 |
| 2009 | 5 | 8 |
| 2010 | 10 | 7 |
| 2011 | 5 | 9 |
| 2012 | 9 | 9 |
| 2013 | 6 | 4 |
| 2014 | 6 | 14 |
| 2015 | 8 | 7 |
| 2016 | 9 | 11 |
| 2017 | 11 | 8 |
| 2018 | 7 | 10 |
| 2019 | 10 | 9 |
| 2020 | 8 | 12 |
| 2021 | 7 | 4 |
| 2022 | 9 | 10 |
| 2023 | 5 | 6 |
| 2024 | 9 | 3 |
| 2025 | 3 | 5 |
| 2026 | 2 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Anti-stiction ionic lubricants in MEMS devices11 Aug 2026US 12,703,834 B1Texas Instruments Incorporated
- Method and device for locally removing and/or modifying a polymer material on a surface28 Apr 2026US 12,612,305 B2Robert Bosch GmbH
- Method of making mems microphone with an anchor9 Dec 2025US 12,495,260 B2Skyworks Solutions, Inc.
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device25 Mar 2025US 12,258,266 B2InvenSense, Inc.
- Nanoscale geometrical quantity certified reference material, and preparation method and use thereof2 Jul 2026US 2026/0184560 A1National Institute of Metrology, China
- Anti-Stiction Process for Mems Device14 May 2026US 2026/0132019 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Mems electrostatic actuator blade configurations and methods of manufacture7 May 2026US 2026/0125261 A1Calient.Ai Inc.
- Roughness selectivity for mems movement stiction reduction19 Feb 2026US 2026/0048979 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor mems structure and method of forming the same8 Jan 2026US 2026/0008667 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Method and apparatus for modulating a light beam609US 5,311,360 AThe Board of Trustees of the Leland Stanford Junior University · 1994
- Method and apparatus for modulating a light beam405US 5,808,797 ASilicon Light Machines Corporation · 1998
- Low reset voltage process for DMD363US 5,331,454 ATexas Instruments Incorporated · 1994
- Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate336US 5,459,610 AThe Board of Trustees of the Leland Stanford Junior University · 1995
- Low surface energy passivation layer for micromechanical devices293US 5,602,671 ATexas Instruments Incorporated · 1997