B81C 2201/115
Roughening a surface
B81C2201/115 (Roughening a surface) appears on 66 US grants and 68 published applications in this corpus.
Search patents in B81C- Granted patents
- 66
- Published applications
- 68
- Assignees
- 37
- Inventors
- 137
- Latest grant
- 9 Dec 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 1 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 1 |
| 2005 | 0 | 0 |
| 2006 | 1 | 2 |
| 2007 | 0 | 3 |
| 2008 | 3 | 4 |
| 2009 | 1 | 2 |
| 2010 | 3 | 2 |
| 2011 | 3 | 6 |
| 2012 | 5 | 1 |
| 2013 | 3 | 0 |
| 2014 | 0 | 4 |
| 2015 | 2 | 2 |
| 2016 | 3 | 4 |
| 2017 | 4 | 4 |
| 2018 | 4 | 3 |
| 2019 | 2 | 2 |
| 2020 | 5 | 8 |
| 2021 | 3 | 2 |
| 2022 | 5 | 4 |
| 2023 | 3 | 5 |
| 2024 | 4 | 2 |
| 2025 | 3 | 3 |
| 2026 | 0 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of making mems microphone with an anchor9 Dec 2025US 12,495,260 B2Skyworks Solutions, Inc.
- Method and system for fabricating a MEMS device cap11 Nov 2025US 12,466,726 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device25 Mar 2025US 12,258,266 B2InvenSense, Inc.
- Method and system for fabricating a MEMS device31 Dec 2024US 12,180,069 B2InvenSense, Inc.
- MEMS device having decreased contact resistance3 Sep 2024US 12,077,431 B2Qorvo US, Inc.
- Nanoscale geometrical quantity certified reference material, and preparation method and use thereof2 Jul 2026US 2026/0184560 A1National Institute of Metrology, China
- Roughness selectivity for mems movement stiction reduction19 Feb 2026US 2026/0048979 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Semiconductor mems structure and method of forming the same8 Jan 2026US 2026/0008667 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method and system for fabricating a mems device cap11 Dec 2025US 2025/0376371 A1InvenSense, Inc.
- Method and system for fabricating a mems device8 May 2025US 2025/0145456 A1InvenSense, Inc.
Most cited
By later US patents
- Method and apparatus for modulating a light beam609US 5,311,360 AThe Board of Trustees of the Leland Stanford Junior University · 1994
- Method and apparatus for modulating a light beam405US 5,808,797 ASilicon Light Machines Corporation · 1998
- Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate336US 5,459,610 AThe Board of Trustees of the Leland Stanford Junior University · 1995
- Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate115US 5,677,783 AThe Board of Trustees of the Leland Stanford Junior University · 1997
- Method and apparatus for using an array of grating light valves to produce multicolor optical images101US 6,219,015 B1The Board of Directors of the Leland Stanford Junior University · 2001