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US 2026/0125261 A1Published application
Mems electrostatic actuator blade configurations and methods of manufacture
AssigneeCalient.Ai Inc.
InventorsAndrew HOCKING, Scott A. MILLER
Life of this patent
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Abstract
Methods, apparatuses and methods of manufacture are described for a MEMS electrostatic blade actuator with different configurations to allow for improvements to performance. The MEMS electrostatic blade actuator with different configurations can be used in a MEMS mirror to reduce mass or reduce operating voltage.
Claims21
An actuator, comprising:
- a frame defining a cavity, the frame including a first base;
- a stage including a second base;
- a first flexure and a second flexure suspending the stage within the cavity;
- a first blade coupled to the first base;
- a second blade coupled to the second base;
- and
- an insulation layer comprising a first portion disposed between the first base and the first blade, a second portion disposed between the second base and the second blade, and a third portion disposed on the second blade,
- wherein the third portion of the insulation layer has a first side in contact with the second blade and a second side that is exposed.
5 more elements
An actuator, comprising:
- a frame defining a cavity;
- a stage;
- a first flexure and a second flexure suspending the stage within the cavity;
- a plurality of stage fingers extended from the stage toward the frame, the stage fingers including a first stage finger;
- and
- a plurality of frame fingers extended from the frame toward the stage, the frame fingers including a first frame finger,
- wherein an end portion of the first stage finger overlaps with an end portion of the first frame finger.
4 more elements
Dependencies are inferred from the claim text.