Stacked die package for MEMS resonator system

A packaging structure for an electromechanical resonator system, the packaging structure comprising:

• a control chip for a microelectromechanical resonator;
• an electromechanical resonator chip that (i) includes the microelectromechanical resonator and (ii) is mounted on the control chip in a stacked die configuration, wherein the electromechanical resonator chip is physically coupled to the control chip by an electrically conductive epoxy;
• a lead frame including at least one electrical lead having a mounting surface and an electrical contact surface, wherein the stacked die configuration is (i) mounted on the mounting surface of the electrical lead and (ii) physically coupled thereto by an electrically insulating epoxy, and wherein the stacked die configuration is electrically coupled to the electrical lead;
• and
• a mold compound, enclosing at least a portion of the lead frame and the stacked die configuration of the control chip and the electromechanical resonator chip, wherein (i) the mounting surface of the electrical lead and the portion of the stacked die configuration which is mounted thereon are enclosed in the mold compound and (ii) the electrical contact surface of the electrical lead is an externally exposed portion of the packaging structure.