Piezoelectric MEMS microphone with spring region
AssigneeSkyworks Solutions, Inc.
InventorsGuofeng Chen, You Qian, Rakesh Kumar, Michael Jon Wurtz, Humberto Campanella-Pineda
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Abstract
A piezoelectric microelectromechanical systems microphone is provided comprising a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, and an electrode disposed over the piezoelectric film layer. A method of manufacturing such a MEMS microphone is also provided.
Claims17
A piezoelectric microelectromechanical systems microphone, comprising:
- a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region;
- a piezoelectric film layer forming a membrane covering a central region of the cavity, the piezoelectric film layer being supported at the anchor region by a spring region, the spring region being formed from the piezoelectric film layer;
- and
- an electrode disposed over the piezoelectric film layer.
A wireless mobile device comprising:
- one or more antennas;
- a front end system that communicates with the one or more antennas;
- and
- one or more piezoelectric microelectromechanical systems microphones, each microphone including a substrate having at least one wall defining a cavity, the at least one wall defining an anchor region, a piezoelectric film layer forming a membrane covering a central region of the cavity, the piezoelectric film layer being supported at the anchor region by a spring region, the spring region being formed from the piezoelectric film layer, and an electrode disposed over the piezoelectric film layer.
A piezoelectric microelectromechanical systems microphone, comprising:
- a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region;
- a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported at the anchor region by a spring region, the spring region including at least two slits and at least one join, the at least two slits including a plurality of radially extending slits and a plurality of circumferentially extending slits extending from each side of each of the plurality of radially extending slits;
- and
- an electrode disposed over the piezoelectric film layer.
Dependencies are inferred from the claim text.