B81C 2201/0147
Film patterning
B81C2201/0147 (Film patterning) appears on 432 US grants and 533 published applications in this corpus.
Search patents in B81C- Granted patents
- 432
- Published applications
- 533
- Assignees
- 189
- Inventors
- 933
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 0 |
| 2003 | 0 | 2 |
| 2004 | 0 | 3 |
| 2005 | 0 | 5 |
| 2006 | 3 | 5 |
| 2007 | 6 | 14 |
| 2008 | 2 | 22 |
| 2009 | 4 | 32 |
| 2010 | 18 | 29 |
| 2011 | 13 | 18 |
| 2012 | 22 | 44 |
| 2013 | 40 | 44 |
| 2014 | 32 | 49 |
| 2015 | 53 | 45 |
| 2016 | 41 | 54 |
| 2017 | 39 | 46 |
| 2018 | 41 | 26 |
| 2019 | 43 | 20 |
| 2020 | 20 | 14 |
| 2021 | 15 | 18 |
| 2022 | 11 | 11 |
| 2023 | 7 | 9 |
| 2024 | 9 | 8 |
| 2025 | 8 | 10 |
| 2026 | 4 | 5 |
By publication year. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Multi-level mems process18 Aug 2026US 12,709,540 B2InvenSense, Inc.
- Microelectromechanical element and a method for manufacturing it28 Jul 2026US 12,692,151 B2Murata Manufacturing Co., Ltd.
- Micro-electro-mechanical system package and fabrication method thereof14 Jul 2026US 12,679,722 B2Vanguard International Semiconductor Corporation
- MEMS sensor package and its manufacturing method21 Apr 2026US 12,606,431 B2TDK Corporation
- Formation of superhydrophobic surfaces16 Dec 2025US 12,500,090 B2
- Method of fabricating micro-electro-mechanical system package24 Sep 2026US 2026/0285676 A1Vanguard International Semiconductor Corporation
- Nanoscale geometrical quantity certified reference material, and preparation method and use thereof2 Jul 2026US 2026/0184560 A1National Institute of Metrology, China
- Dielectric stack for microelectromechanical system devices and methods of fabrication thereof30 Apr 2026US 2026/0116740 A1Texas Instruments Incorporated
- Formation of superhydrophobic surfaces12 Mar 2026US 2026/0076121 A1Brookhaven Science Associates, LLC
- Mems device29 Jan 2026US 2026/0028222 A1Rohm Co., Ltd.
Most cited
By later US patents
- Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials513US 7,115,305 B2California Institute of Technology · 2006
- Integration of absorption based heating bake methods into a photolithography track system470US 9,613,801 B2Tokyo Electron Limited · 2017
- Sub-lithographic nano interconnect structures, and method for forming same102US 7,553,760 B2International Business Machines Corporation · 2009
- Methods for forming improved self-assembled patterns of block copolymers101US 7,347,953 B2International Business Machines Corporation · 2008
- Sequential infiltration synthesis for advanced lithography93US 8,980,418 B2Uchicago Argonne, LLC · 2015