B81C 2201/0154
Other processes for film patterning not provided for in b81c2201/0149 - b81c2201/015
Official title: other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015
B81C2201/0154 (Other processes for film patterning not provided for in b81c2201/0149 - b81c2201/015) appears on 36 US grants and 47 published applications in this corpus.
Search patents in B81C- Granted patents
- 36
- Published applications
- 47
- Assignees
- 27
- Inventors
- 86
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2007 | 0 | 2 |
| 2008 | 0 | 2 |
| 2009 | 1 | 3 |
| 2010 | 1 | 2 |
| 2011 | 4 | 2 |
| 2012 | 1 | 1 |
| 2013 | 1 | 2 |
| 2014 | 1 | 2 |
| 2015 | 4 | 1 |
| 2016 | 1 | 5 |
| 2017 | 4 | 5 |
| 2018 | 4 | 7 |
| 2019 | 2 | 1 |
| 2020 | 4 | 2 |
| 2021 | 4 | 0 |
| 2022 | 2 | 3 |
| 2023 | 0 | 3 |
| 2024 | 1 | 3 |
| 2025 | 0 | 1 |
| 2026 | 1 | 0 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- MEMS sensor package and its manufacturing method21 Apr 2026US 12,606,431 B2TDK Corporation
- Undercut-free patterned aluminum nitride structure and methods for forming the same5 Nov 2024US 12,134,824 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method for producing microstructures in a glass substrate5 Jul 2022US 11,377,387 B1Lpkf Laser & Electronics AG
- Undercut-free patterned aluminum nitride structure and methods for forming the same28 Jun 2022US 11,371,133 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors9 Nov 2021US 11,169,110 B2Honeywell International Inc.
- Mems device and manufacturing method thereof19 Jun 2025US 2025/0197195 A1AAC Technologies PTE.Ltd.
- Undercut-free patterned aluminum nitride structure and methods for forming the same7 Nov 2024US 2024/0368746 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Mems device with membrane and upright nanostructures1 Aug 2024US 2024/0253976 A1Infineon Technologies AG
- Mems device with membrane comprising laser structured nanostructures and method for manufacturing same1 Aug 2024US 2024/0253977 A1Infineon Technologies AG
- Mems microphone and method of manufacturing the same30 Nov 2023US 2023/0382714 A1DB HiTek Co., Ltd.
Most cited
By later US patents
- Direct nanoscale patterning of metals using polymer electrolytes18US 7,998,330 B2The Board of Trustees of the University of Illinois · 2011
- MEMS switches with reduced switching voltage and methods of manufacture4US 8,451,077 B2International Business Machines Corporation · 2013
- Magnetic patterning method and system3US 8,859,059 B2Yeda Research and Development Co. Ltd. · 2014
- Probe based patterning of microelectronic and micromechanical devices2US 7,514,942 B2Intel Corporation · 2009
- Ultra thin alignment walls for di-block copolymer2US 8,187,480 B2Seagate Technology LLC · 2012