Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors
AssigneeHoneywell International Inc.
InventorsKeith Francis Edwin Pratt, Cristian Vasile Diaconu, Yong-Fa Wang
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Abstract
Embodiments relate generally to systems, devices, and methods for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor. A method may comprise providing a blade on a surface of a substrate; providing a ridge along the perimeter of the substrate; pressing the electrode and the electrolyte onto the blade and the ridge; cutting the electrode into multiple electrodes; positioning the electrolyte to contact the surface, the blade, and the ridge; and positioning the multiple electrodes to contact the surface, the blade, and the ridge.
Claims12
A method for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor, the method comprising:
- providing a ridge along a perimeter of a surface of a substrate;
- pressing the electrode and the electrolyte onto the ridge, wherein the electrolyte is positioned to contact the top of the electrode;
- cutting the electrode into multiple electrodes;
- and
- providing a blade on the surface of the substrate, wherein a height of the ridge is greater than a height of the blade, wherein the ridge is positioned to surround the blade, wherein pockets are positioned along the surface between the blade and the ridge, and wherein the ridge is tapered and configured to cut the electrolyte.
A method for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor, the method comprising:
- providing a blade on a surface of a substrate;
- pressing the electrode and the electrolyte onto the blade, wherein the electrolyte is positioned to contact the top of the electrode;
- and
- cutting the electrode into multiple electrodes.
A microelectromechanical system (MEMS) electrochemical sensor comprising:
- a substrate comprising a surface;
- a blade configured to cut an electrode into separate electrodes;
- and
- a ridge extending along the perimeter of the surface of the substrate, wherein the height of the ridge is greater than the height of the blade, wherein the ridge is positioned to surround the blade, wherein pockets are positioned along the surface between the blade and the ridge, wherein the ridge is tapered and configured to cut an electrolyte.
A microelectromechanical system (MEMS) electrochemical sensor comprising:
- a substrate comprising a surface;
- a ridge extending along the perimeter of the surface of the substrate, wherein the ridge is tapered and configured to cut an electrolyte;
- and
- a blade configured to cut an electrode into separate electrodes, wherein the height of the ridge is greater than the height of the blade, wherein the ridge is positioned to surround the blade, wherein pockets are positioned along the surface between the blade and the ridge.
Dependencies are inferred from the claim text.