US 7,998,330 B2 · Direct nanoscale patterning of metals using polymer electrolytes

Abstract

Disclosed herein are electrochemical fabrication platforms for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components use an electrochemical stamping tool such as solid state polymeric electrolytes for generating patterns of relief and/or recessed features exhibiting excellent reproducibility, pattern fidelity and resolution on surfaces of solid state ionic conductors and in metal. Electrochemical stamping tools are capable high throughput patterning of large substrate areas, are compatible with commercially attractive manufacturing pathways to access a range of functional systems and devices including nano- and micro-electromechanical systems, sensors, energy storage devices, metal masks for printing, interconnects, and integrated electronic circuits.

Claims25

Dependent claims

A method of making a structure comprising:

providing a first electrode in electrical contact with a solid state ionic conductor;
providing a second electrode in electrical contact with a metal;
establishing electrical contact between at least a portion of said solid state ionic conductor and said metal by physically contacting said solid state ionic conductor with said metal;
and
generating an electric field between said first and second electrodes, wherein a portion of the metal is oxidized thereby generating metal ions and free electrons, wherein said metal ions migrate through the solid state ionic conductor to the first electrode where they are reduced and wherein said free electrons migrate to said second electrode, thereby making said structures;
wherein said solid state ionic conductor is a stamping tool comprising a pattern of relief features that generates a pattern of electrical contacts between said stamping tool and said metal to at least partially transfer said pattern of relief features to said metal via electrochemical etching.

3 more elements

Dependencies are inferred from the claim text.

Direct nanoscale patterning of metals using polymer electrolytes

Life of this patent

Direct nanoscale patterning of metals using polymer electrolytes

Life of this patent

Abstract

Claims25