Mems device with membrane and upright nanostructures
AssigneeInfineon Technologies AG
InventorsHutomo Suryo Wasisto, Sebastian Anzinger, Fabian Streb
Life of this patent
Estimating the term…
Abstract
In accordance with an embodiment a microelectromechanical system (MEMS) device including a substrate comprising a vertically extending through hole and a horizontally extending membrane structure covering the through hole, where the membrane structure comprises a plurality of upright nanostructures for providing a liquid repellent membrane surface. In other embodiments, certain methods are used for fabricating MEMS devices.
Claims20
A microelectromechanical system (MEMS) device comprising:
- a substrate having a through-hole extending vertically;
- a membrane structure extending horizontally to cover the through-hole;
- and
- a plurality of upright nanostructures located at the membrane structure, the upright nanostructures forming a liquid repellent membrane surface.
A method for fabricating a MEMS device, the method comprising:
- providing a substrate comprising a first substrate surface and an second substrate surface opposite the first substrate surface;
- providing a sacrificial layer located at the first substrate surface;
- forming nanoimprints into the sacrificial layer;
- depositing a first material onto the sacrificial layer to fill the nanoimprints;
- forming a cavity into the substrate, the cavity being positioned opposite to the nanoimprints filled with the first material;
- extending the cavity between the second substrate surface and the sacrificial layer;
- and
- releasing the nanoimprints by removing the sacrificial layer through the cavity to form upright nanostructures, thereby creating a membrane structure having the upright nanostructures that extend into the cavity.
A method for fabricating a MEMS device, the method comprising:
- providing a substrate having a first substrate surface and a second substrate surface opposite the first substrate surface;
- creating upright nanostructures in the first substrate surface;
- structuring a cavity into the substrate, the cavity being located opposite to the upright nanostructures, and the cavity extending from the second substrate surface up to a portion of the substrate remaining between the cavity and the upright nanostructures;
- and
- creating a membrane structure horizontally extending over the cavity and having the upright nanostructures integrated in the membrane structure, wherein the upright nanostructures face away from the cavity.
Dependencies are inferred from the claim text.