Method for producing microstructures in a glass substrate
AssigneeLpkf Laser & Electronics AG
InventorsRoman Ostholt, Norbert Ambrosius
Life of this patent
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Abstract
A method for producing microstructures includes introducing modifications by a laser beam into a volume between two opposite outer surfaces of a glass substrate. An etching method is carried out which provides anisotropic material removal in one of the outer surfaces so as to produce recesses that have a conical shape. A layer that is resistant to an etching effect of the etching method is applied as a cover layer to only one outer surface. Then, a further etching method is carried out so that material is removed in the other outer surface until recesses of this other outer surface, which are produced and/or enlarged by the further etching method, have reached the cover layer.
Claims14
A method for producing microstructures in a glass substrate, the method comprising:
- introducing modifications by a laser beam into at least one volume between two opposite outer surfaces of the glass substrate;
- after introducing the modifications, carrying out an etching method which provides anisotropic material removal in at least one of the two outer surfaces so as to produce a plurality of recesses that are cone-shaped at least in sections;
- and
- after carrying out the etching method, applying a layer that is resistant to an etching effect of the etching method as a cover layer in a region that includes at least individual ones of the recesses to only one of the two outer surfaces as a first outer surface;
- and
- after applying the layer that is resistant to the etching effect of the etching method, carrying out a further etching method of the glass substrate so that material is removed in the other one of the two outer surfaces as a second outer surface facing away from the cover layer until recesses of the second outer surface, which are produced by the further etching method and/or are produced by the etching method and are enlarged by the further etching method, have reached the cover layer.
Dependencies are inferred from the claim text.