MEMS switches with reduced switching voltage and methods of manufacture

A structure comprising:

• a substrate;
• at least two fixed electrodes formed over the substrate, the at least two fixed electrodes including a first fixed electrode and a second fixed electrode formed on the substrate;
• at least two cantilevered electrodes having ends which overlap and which are structured and operable to directly contact one another upon an application of a voltage to the at least one fixed electrode;
• and
• a hermetically sealed volume having encapsulated therein the at least two cantilevered electrodes and the at least two fixed electrodes,
• wherein the first fixed electrode is aligned vertically under the first cantilevered electrode in the hermetically sealed volume;
• the second fixed electrode is aligned vertically under the second cantilevered electrode in the hermetically sealed volume;
• the first fixed electrode is structured and operable to receive a positive voltage and pull the first cantilevered electrode towards the first fixed electrode in a vertical direction;
• and
• the second fixed electrode is structured and operable to receive a negative voltage and push the second cantilevered electrode away from the second fixed electrode in a vertical direction.

A structure comprising:

• a dielectric material;
• a plurality of vias formed in the dielectric material;
• a first fixed electrode formed on the dielectric material and in contact with a first via of the plurality of vias;
• a second fixed electrode formed on the dielectric material and in contact with a second via of the plurality of vias;
• a first cantilevered electrode comprising a first end and a second end, the first end being formed in contact with a third via of the plurality of vias;
• a second cantilevered electrode comprising a first end and a second end, the first end being formed in contact with a fourth via of the plurality of vias;
• and
• a hermetically sealed volume having encapsulated therein the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, the hermetically sealed volume being a void located at least between the first fixed electrode and the first cantilevered electrode, and between the second fixed electrode and the second cantilevered electrode,
• wherein the first fixed electrode is aligned vertically under the first cantilevered electrode;
• the second fixed electrode is aligned vertically under the second cantilevered electrode;
• the second end of the first cantilevered electrode overlaps vertically with the second end of the second cantilevered electrode;
• the first fixed electrode is structured and operable to receive a positive voltage and pull the first cantilevered electrode towards the first fixed electrode in a vertical direction;
• the second fixed electrode is structured and operable to receive a negative voltage and push the second cantilevered electrode away from the second fixed electrode in a vertical direction;
• and
• the second end of the first cantilevered electrode and the second end of the second cantilevered electrode are operable to directly contact one another upon the first fixed electrode receiving the positive voltage and the second fixed electrode receiving the negative voltage.