B81C 2201/0156
Lithographic techniques
B81C2201/0156 (Lithographic techniques) appears on 119 US grants and 152 published applications in this corpus.
Search patents in B81C- Granted patents
- 119
- Published applications
- 152
- Assignees
- 114
- Inventors
- 367
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 2 |
| 2003 | 1 | 2 |
| 2004 | 2 | 3 |
| 2005 | 1 | 4 |
| 2006 | 2 | 4 |
| 2007 | 2 | 3 |
| 2008 | 2 | 3 |
| 2009 | 1 | 4 |
| 2010 | 5 | 8 |
| 2011 | 1 | 4 |
| 2012 | 4 | 1 |
| 2013 | 4 | 5 |
| 2014 | 4 | 5 |
| 2015 | 5 | 4 |
| 2016 | 3 | 8 |
| 2017 | 7 | 8 |
| 2018 | 8 | 4 |
| 2019 | 5 | 8 |
| 2020 | 7 | 11 |
| 2021 | 8 | 10 |
| 2022 | 7 | 10 |
| 2023 | 6 | 13 |
| 2024 | 9 | 8 |
| 2025 | 8 | 12 |
| 2026 | 10 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- MEMS structure including a buried cavity with antistiction protuberances, and manufacturing methods thereof6 Oct 2026US 12,753,067 B2STMicroelectronics S,r.l.
- Microscale flexible strain sensor8 Sep 2026US 12,729,106 B2Carnegie Mellon University
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Microelectromechanical element and a method for manufacturing it28 Jul 2026US 12,692,151 B2Murata Manufacturing Co., Ltd.
- Micro-electro-mechanical system package and fabrication method thereof14 Jul 2026US 12,679,722 B2Vanguard International Semiconductor Corporation
- Method of fabricating micro-electro-mechanical system package24 Sep 2026US 2026/0285676 A1Vanguard International Semiconductor Corporation
- Silicon-metal composite micro-electro-mechanical system-based material atmospheric corrosion sensor, preparation method therefor, and material atmospheric corrosion detection equipment25 Jun 2026US 2026/0176132 A1University of Science and Technology Beijing
- Method for manufacturing an electronic device11 Jun 2026US 2026/0159381 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Inertia measurement unit and method for forming the same28 May 2026US 2026/0145931 A1AAC Technologies PTE.Ltd.
- Method for manufacturing a microelectromechanical system mirror device, manufacturing apparatus, set of mirror devices and wafer7 May 2026US 2026/0125262 A1Infineon Technologies AG
Most cited
By later US patents
- Decal transfer lithography220US 7,662,545 B2The Board of Trustees of the University of Illinois · 2010
- Formation of microstructures using a preformed photoresist sheet144US 5,378,583 AWisconsin Alumni Research Foundation · 1995
- Microstructure synthesis by flow lithography and polymerization115US 7,709,544 B2Massachusetts Institute of Technology · 2010
- Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof107US 7,217,562 B2Princeton University · 2007
- Formation of microstructures using a preformed photoresist sheet80US 5,576,147 AWisconsin Alumni Research Foundation · 1996