B81C 2201/0157
Gray-scale mask technology
B81C2201/0157 (Gray-scale mask technology) appears on 29 US grants and 37 published applications in this corpus.
Search patents in B81C- Granted patents
- 29
- Published applications
- 37
- Assignees
- 21
- Inventors
- 78
- Latest grant
- 9 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 1 |
| 2003 | 0 | 0 |
| 2004 | 1 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 1 |
| 2007 | 1 | 1 |
| 2008 | 1 | 1 |
| 2009 | 0 | 1 |
| 2010 | 0 | 1 |
| 2011 | 1 | 0 |
| 2012 | 2 | 1 |
| 2013 | 1 | 0 |
| 2014 | 1 | 2 |
| 2015 | 2 | 1 |
| 2016 | 0 | 1 |
| 2017 | 1 | 1 |
| 2018 | 1 | 2 |
| 2019 | 1 | 4 |
| 2020 | 3 | 5 |
| 2021 | 3 | 3 |
| 2022 | 3 | 3 |
| 2023 | 2 | 2 |
| 2024 | 2 | 2 |
| 2025 | 1 | 2 |
| 2026 | 2 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Method for forming semiconductor structure9 Jun 2026US 12,649,652 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Systems and methods for silicon microstructures fabricated via greyscale DRIE with SOI release9 Jun 2026US 12,652,976 B2Lawrence Livermore National Security, LLC
- Capacitive micromachined ultrasonic transducer with contoured electrode29 Apr 2025US 12,285,780 B2The Board of Trustees of the Leland Stanford Junior University
- Semiconductor structure and method for forming the same25 Jun 2024US 12,017,908 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Isolated protrusion/recession features in microelectromechanical systems19 Mar 2024US 11,932,529 B2Texas Instruments Incorporated
- Methods of operating and manufacturing capacitive micromachined ultrasonic transducer with contoured electrode29 Jan 2026US 2026/0027584 A1The Board of Trustees of the Leland Stanford Junior University
- Device for nanoscale thermal measurements and associated method for manufacturing said device20 Mar 2025US 2025/0093212 A1Centre National De La Recherche Scientifique
- Mems component with a membrane spring and method for producing a membrane spring6 Feb 2025US 2025/0042721 A1
- Method for forming semiconductor structure29 Aug 2024US 2024/0286889 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Pulse train excitation for capacitive micromachined ultrasonic transducer23 May 2024US 2024/0165663 A1The Board of Trustees of the Leland Stanford Junior University
Most cited
By later US patents
- Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof107US 7,217,562 B2Princeton University · 2007
- Gradient structures interfacing microfluidics and nanofluidics53US 8,333,934 B2Princeton University · 2012
- Process for manufacturing a micromechanical structure having a buried area provided with a filter10US 8,633,553 B2STMicroelectronics S,r.l. · 2014
- Fabrication method of topographically modulated microstructures using pattern homogenization with UV light9US 8,236,480 B2The United States of America, as represented by the Secretary of Commere, the National Institute of Standards and Technology · 2012
- Contoured electrode for capacitive micromachined ultrasonic transducer4US 11,260,424 B2The Board of Trustees of the Leland Stanford Junior University · 2022