Microscale flexible strain sensor
AssigneeCarnegie Mellon University
InventorJay Reddy
Life of this patent
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Abstract
Disclosed herein are devices comprising stretchable interdigitated electrode arrays and methods for fabricating the devices. The devices are capable of acting as elongation sensors by sensing a change in the capacitance of the device as the distance between the interdigitated fingers changes when the device is elongated or compressed. The device may be coupled to other devices such as to be able to sense elongation or compression of the coupled device. The interdigitated fingers of the device are supported by a substrate and may be fabricated using traditional microfabrication techniques.
Claims24
A microfabricated device comprising:
- a plurality of interdigitated fingers;
- wherein each finger forms an independent stack comprising:
- a sub-layer composed of a polymer;
- and
- a conductive layer disposed on the sub-layer;
- wherein each finger is able to move with respect to each other along a longitudinal axis of the device.
A microfabricated device comprising:
- one or more first fingers;
- and
- one or more second fingers;
- wherein the one or more first fingers and the one or more second fingers are interdigitated;
- wherein each of the one or more first fingers and the one or more second fingers comprise:
- a sub-layer comprised of a polymer;
- and
- a conductive layer disposed on the sub-layer;
- wherein the first fingers are able to independently move with respect to the second fingers along a longitudinal axis of the device, and wherein the second fingers are able to independently move with respect to the first fingers along the longitudinal axis of the device.
A microfabricated device comprising:
- a plurality of interdigitated fingers;
- wherein each finger forms an independent stack, each independent stack comprising:
- a sub-layer comprised of a polymer;
- and
- a conductive layer disposed on the sub-layer.
Dependencies are inferred from the claim text.