Inertia measurement unit and method for forming the same

A method for forming an inertia measurement unit,

• wherein the inertia measurement unit comprises:
• a first base;
• a dielectric layer stacked on the first base and comprising a notch;
• a first electric-conductive layer stacked on the dielectric layer, wherein first openings are formed in the first electric-conductive layer;
• a second electric-conductive layer supported on the first electric-conductive layer by means of a support portion, wherein second openings are formed in the second electric-conductive layer;
• a second base, wherein the second base covers the second electric-conductive layer by means of a bonding structure, a closed space is formed between the second base and the first base, the closed space comprises a plurality of cavities spaced from one another, and the plurality of cavities have different cavity pressures;
• a gas-exhaust channel connected to one of the plurality of cavities and configured to connect the one of the plurality of cavities with an outer environment;
• and
• a closure portion configured to close the gas-exhaust channel, and,
• wherein the method for forming the inertia measurement unit comprises:
• forming the first base;
• forming the dielectric layer and the first electric-conductive layer on the first base, the dielectric layer comprising the notch;
• and forming the first openings in the first electric-conductive layer;
• forming the second electric-conductive layer on the first electric-conductive layer, and forming a first bonding layer on the second electric-conductive layer;
• forming the second openings in the second electric-conductive layer, and forming the support portion at the second electric-conductive layer;
• forming the second base;
• forming a second bonding layer on the second base;
• forming a groove at the second base;
• bonding the first bonding layer and the second bonding layer together at a high temperature to form the bonding structure, and forming the closed space between the second base and the first base, the closed space comprising the plurality of cavities spaced from one another;
• forming the gas-exhaust channel in the second base and the bonding structure to release air in at least one of the plurality of cavities;
• forming the closure portion by depositing on the second base, to close the gas-exhaust channel;
• and
• forming the inertia measurement unit.