B81C 2201/0111
Bulk micromachining
B81C2201/0111 (Bulk micromachining) appears on 293 US grants and 316 published applications in this corpus.
Search patents in B81C- Granted patents
- 293
- Published applications
- 316
- Assignees
- 138
- Inventors
- 680
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 3 | 0 |
| 1997 | 4 | 0 |
| 1998 | 4 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 6 | 2 |
| 2002 | 4 | 10 |
| 2003 | 4 | 6 |
| 2004 | 10 | 22 |
| 2005 | 7 | 15 |
| 2006 | 7 | 13 |
| 2007 | 10 | 10 |
| 2008 | 10 | 9 |
| 2009 | 13 | 9 |
| 2010 | 14 | 14 |
| 2011 | 8 | 11 |
| 2012 | 11 | 11 |
| 2013 | 10 | 8 |
| 2014 | 10 | 8 |
| 2015 | 15 | 16 |
| 2016 | 13 | 23 |
| 2017 | 17 | 19 |
| 2018 | 15 | 14 |
| 2019 | 18 | 19 |
| 2020 | 18 | 19 |
| 2021 | 18 | 16 |
| 2022 | 10 | 8 |
| 2023 | 8 | 6 |
| 2024 | 10 | 12 |
| 2025 | 7 | 8 |
| 2026 | 3 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Micromechanical arm array for mems actuators8 Sep 2026US 12,729,109 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Method for manufacturing an integrated system including a capacitive pressure sensor and an inertial sensor, and integrated system17 Feb 2026US 12,552,665 B2STMicroelectronics S,r.l.
- Methods of fabricating porous silicon structures6 Jan 2026US 12,516,438 B2The Methodist Hospital
- Mirror device manufacturing method and mirror unit manufacturing method30 Dec 2025US 12,509,347 B2Hamamatsu Photonics K.K.
- Method for manufacturing a capacitive pressure sensor and capacitive pressure sensor2 Dec 2025US 12,486,162 B2STMicroelectronics S,r.l.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- MEMS with Reduced Acoustic Impedance6 Aug 2026US 2026/0230743 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Mems element for moving a mass element of an acoustic transducer for generating and/or receiving acoustic signals, and acoustic transducer having such a mems element2 Jul 2026US 2026/0189857 A1
- Mems device with compensation of the mechanical stress and related manufacturing process4 Jun 2026US 2026/0152384 A1STMicroelectronics International N. V.
- Method of manufacturing a layered structure for a mems apparatus and mems apparatus having such a layered structure26 Feb 2026US 2026/0054980 A1OQmented GmbH
Most cited
By later US patents
- Method of anisotropically etching silicon679US 5,501,893 ARobert Bosch GmbH · 1996
- Method for forming a multilayer structure201US 8,470,689 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives · 2013
- Microstructures and single mask, single-crystal process for fabrication thereof160US 5,719,073 ACornell Research Foundation, Inc. · 1998
- Three-axis accelerometers and fabrication methods159US 7,892,876 B2Qualtre, Inc. · 2011
- Method of making a product with a micro or nano sized structure and product158US 7,531,120 B2Aquamarijn Holding B.V. · 2009