Back to results
US 12,552,665 B2Granted
Method for manufacturing an integrated system including a capacitive pressure sensor and an inertial sensor, and integrated system
AssigneeSTMicroelectronics S.r.l.
InventorsPaolo Ferrari, Lorenzo Corso, Flavio Francesco Villa, Silvia Nicoli, Luca Lamagna
Life of this patent
Estimating the term…
Abstract
Method for manufacturing a micro-electro-mechanical system, MEMS, integrating a first MEMS device and a second MEMS device. The first MEMS device is a capacitive pressure sensor and the second MEMS device is an inertial sensor. The steps of manufacturing the first and second MEMS devices are, at least partly, shared with each other, resulting in a high degree of integration on a single die, and allowing to implement a manufacturing process with high yield and controlled costs.
Claims20
A device, comprising:
- a first MEMS device;
- a second MEMS device;
- a substrate;
- a first electrode coupled to the first MEMS device extending on the substrate;
- a first layer on the first electrode;
- a protection layer, impermeable to an etching chemical solution, on the first layer;
- a membrane layer, of a porous material which is permeable to the etching chemical solution, on the protection layer;
- a cavity overlapped by the membrane layer, the cavity is defined by at least one lower surface of the membrane layer, at least one upper surface of the first electrode that faces the at least one lower surface, and at least one sidewall of the protection layer that is transverse to the at least one lower surface of the membrane layer and the at least one upper surface of the first electrode;
- an anti-stiction layer is within the cavity and covers the at least one lower surface of the membrane layer, the at least one upper surface of the electrode, and the at least one sidewall of the protection layer;
- a first structural layer seals pores of the membrane layer and forms, with the membrane layer, a suspended structure of the first MEMS device, the suspended structure being a second electrode capacitively coupled to the first electrode through the cavity;
- and
- a second structural layer is on the first structural layer, and the second structural layer includes:
- moveable structures of the second MEMS device;
- and
- biasing structures of the first and second electrodes of the first MEMS device.
12 more elements
A device, comprising:
- a substrate including a surface;
- a first electrode extending on the surface of the substrate;
- a plurality of layers on the surface of the substrate, the plurality of layers including:
- a first layer on the first electrode;
- a protection layer that is impermeable to an etching chemical solution on the first layer;
- and
- a membrane layer of a porous material on the protection layer, the porous material of the membrane layer is permeable to the etching chemical solution;
- a cavity defined by at least one lower surface of the membrane layer, at least one upper surface of the first electrode that faces the at least one lower surface, and at least one sidewall of the protection layer that is transverse to the at least one lower surface of the membrane layer and the at least one upper surface of the first electrode;
- an anti-stiction layer is within the cavity and covers the at least one lower surface of the membrane, the at least one upper surface of the electrode, and the at least one sidewall of the protection layer;
- a structural layer on the plurality of layers;
- a plurality of through holes extending into the structural layer and extending into the plurality of layers;
- a first MEMS device including a membrane of the plurality of layers and the structural layer overlapping the cavity;
- and
- a second MEMS device adjacent to the first MEMS device.
11 more elements
A device, comprising:
- a substrate including a surface;
- a first electrode extending on the surface of the substrate;
- a plurality of layers on the surface of the substrate, the plurality of layers includes:
- a first layer on the first electrode;
- a protection layer that is impermeable to an etching chemical solution on the first layer;
- and
- a membrane layer of a porous material on the protection layer, the porous material of the membrane layer is permeable to the etching chemical solution;
- a cavity defined by at least one lower surface of the membrane layer, at least one upper surface of the first electrode, and at least one sidewall of the protection layer that is transverse to the at least one lower surface of the membrane layer and the at last one upper surface of the first electrode;
- an anti-stiction layer is within the cavity and covers the at least one lower surface of the membrane, the at least one upper surface of the electrode, and the at least one sidewall of the protection layer, and the anti-stiction layer fully and completely lines the cavity;
- a structural layer on the plurality of layers;
- a plurality of through holes extending into the structural layer and extending into the plurality of layers;
- a first MEMS device including a membrane of the plurality of layers and the structural layer overlapping the cavity;
- a second MEMS device adjacent to the first MEMS device;
- and
- an anti-stiction layer is within the cavity, lines the cavity, and partially fills the cavity.
12 more elements
Dependencies are inferred from the claim text.