Mirror device manufacturing method and mirror unit manufacturing method
AssigneeHamamatsu Photonics K.K.
InventorsDaiki Suzuki, Tomoyuki Ide, Mikito Takahashi
Life of this patent
Estimating the term…
Abstract
A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion; and a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step. A mirror unit manufacturing method includes a sealing step of sealing the mirror device after the collecting step.
Claims10
A mirror device manufacturing method comprising:
- a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion;
- and
- a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step such that the foreign substances are collected by the collection member after the mirror layer becomes swingable,
- wherein the collecting step is performed with respect to a mirror surface formed on the movable portion,
- the collection member includes an adhesion portion constituted of a film or a tape having an adhesive force, and
- wherein in the collecting step, the collection of foreign substances is performed by bringing the adhesion portion of the collection member into contact with only the foreign substances without the adhesion portion of the collection member coming into contact with the mirror surface.
A mirror unit manufacturing method comprising:
- a preparing step of preparing a mirror device having a structure including a base portion, a movable portion, a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion, and a mirror layer provided in the movable portion;
- a fixing step of fixing the mirror device to a mounting portion after the preparing step;
- and
- a collecting step of performing collection of foreign substances from the structure using a collection member after the fixing step such that the foreign substances are collected by the collection member after the mirror layer becomes swingable,
- wherein the collecting step is performed with respect to a mirror surface formed on the movable portion,
- the collection member includes an adhesion portion constituted of a film or a tape having an adhesive force, and
- wherein in the collecting step, the collection of foreign substances is performed by bringing the adhesion portion of the collection member into contact with only the foreign substances without the adhesion portion of the collection member coming into contact with the mirror surface.
Dependencies are inferred from the claim text.