Method for manufacturing a capacitive pressure sensor and capacitive pressure sensor

A method, comprising:

• forming, on a substrate, an insulating layer;
• forming, on the insulating layer, a first structural layer;
• forming, on the first structural layer, a first etch stop layer;
• forming, on the first etch stop layer, a sacrificial layer, the sacrificial layer including a trench that delimits a portion of the sacrificial layer, the trench extending through the sacrificial layer and exposing a surface of the first etch stop laver;
• forming, on the sacrificial layer-and, in the trench, and on the surface of the first etch stop layer, a second etch stop layer, the second etch stop layer including an opening aligned with the portion of the sacrificial layer and exposing a surface of the sacrificial laver;
• forming, on the second etch stop layer, in the opening, and on the surface of the sacrificial laver, a second structural layer, the second structural layer including a plurality of openings aligned with the portion of the sacrificial layer and exposing the surface of the sacrificial layer;
• forming, on the second structural layer, in the plurality of openings, and the surface of the sacrificial laver, a permeable layer;
• and
• forming a chamber by removing the portion of the sacrificial layer.

A method, comprising:

• forming, on a substrate, an insulating layer;
• forming, on the insulating layer, a first structural layer;
• forming, on the first structural layer and the insulating layer, a first protection layer, the first protection layer being spaced from the substrate by the insulating layer;
• forming, on the first protection layer, a sacrificial layer;
• forming, on the sacrificial layer, a second protection layer, the second protection layer being spaced from the first protection layer by the sacrificial layer the second protection layer including an opening directly overlying the sacrificial layer;
• forming, on the second protection layer and in the opening of the second protection layer, a second structural layer, a portion of the second structural layer on the second protection layer being spaced from the sacrificial layer by the second protection layer the second structural layer including a plurality of openings directly overlying the sacrificial layer;
• forming, on the second structural layer and in the plurality of openings of the second structural layer, a permeable layer, a portion of the permeable layer on the portion of the second structural layer being spaced from the second protection layer by the portion of the second structural laver;
• and
• forming a chamber by removing at least a portion of the sacrificial layer.