B81C 2201/0102
Surface micromachining
B81C2201/0102 (Surface micromachining) appears on 537 US grants and 622 published applications in this corpus.
Search patents in B81C- Granted patents
- 537
- Published applications
- 622
- Assignees
- 277
- Inventors
- 1,194
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 3 | 0 |
| 1998 | 6 | 0 |
| 1999 | 6 | 0 |
| 2000 | 13 | 0 |
| 2001 | 15 | 4 |
| 2002 | 9 | 11 |
| 2003 | 10 | 32 |
| 2004 | 22 | 29 |
| 2005 | 24 | 36 |
| 2006 | 17 | 22 |
| 2007 | 21 | 22 |
| 2008 | 12 | 9 |
| 2009 | 8 | 24 |
| 2010 | 25 | 23 |
| 2011 | 12 | 19 |
| 2012 | 14 | 12 |
| 2013 | 17 | 17 |
| 2014 | 19 | 15 |
| 2015 | 11 | 6 |
| 2016 | 11 | 37 |
| 2017 | 26 | 34 |
| 2018 | 31 | 34 |
| 2019 | 30 | 27 |
| 2020 | 35 | 41 |
| 2021 | 32 | 28 |
| 2022 | 18 | 22 |
| 2023 | 16 | 27 |
| 2024 | 29 | 35 |
| 2025 | 19 | 31 |
| 2026 | 19 | 25 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Anchor structure8 Sep 2026US 12,729,107 B2Lawrence Semiconductor Research Laboratory, Inc.
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Multi-level mems process18 Aug 2026US 12,709,540 B2InvenSense, Inc.
- Attachable microphone and manufacturing method therefor21 Jul 2026US 12,686,612 B2Center for Advanced Soft Electronics
- Method for producing a microelectromechanical device comprising a cap structure and a microelectromechanical device8 Oct 2026US 2026/0307983 A1
- Anchor structure1 Oct 2026US 2026/0296876 A1Lawrence Semiconductor Research Laboratory, Inc.
- Method for manufacturing a microelectromechanical component, and microelectromechanical component1 Oct 2026US 2026/0296882 A1
- Method for producing a microstructural element and microstructural element10 Sep 2026US 2026/0265049 A1Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Micromechanical component for a sensor device, microphone device and/or micro-loudspeaker device27 Aug 2026US 2026/0250121 A1
Most cited
By later US patents
- Method for fabricating a structure for a microelectromechanical systems (MEMS) device722US 6,794,119 B2Iridigm Display Corporation · 2004
- Display device with micromechanical leaf spring switches250US 4,681,403 AU. S. Philips Corporation · 1987
- Polycrystalline silicon germanium films for forming micro-electromechanical systems226US 6,210,988 B1The Regents of the University of California · 2001
- Method for forming a multilayer structure201US 8,470,689 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives · 2013
- Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation191US 7,008,812 B1IC Mechanics, Inc. · 2006