Anchor structure
AssigneeLawrence Semiconductor Research Laboratory, Inc.
InventorsBishnu Prasanna Gogoi, Chantal Arena
Life of this patent
Estimating the term…
Abstract
A semiconductor device is disclosed having one or more anchors that is configured to support a moving mass. The one or more anchors are formed in or on the semiconductor substrate. The one or more anchors are attached to the semiconductor substrate. An intermediate layer is formed overlying the semiconductor substrate. A device layer is formed overlying the intermediate layer. The device layer, the intermediate layer, and the semiconductor substrate are single crystal. The moving mass is formed in the device layer. The at least one anchor comprises a dielectric material coupled to the semiconductor substrate. The moving mass couples to the at least one anchor. Portions of the intermediate layer are removed to free the moving mass in relation the semiconductor substrate.
Claims13
A semiconductor device having one or more anchors configured to support a moving mass, the semiconductor device comprising:
- a semiconductor substrate;
- an intermediate layer overlying the semiconductor substrate;
- a device layer formed overlying the intermediate layer, wherein materials of the semiconductor substrate, the intermediate layer, and the device layer are single crystal materials, and wherein the moving mass is formed in the device layer;
- and
- at least one anchor supporting the moving mass,
- the at least one anchor comprising a dielectric material coupled to the semiconductor substrate,
- wherein the moving mass is coupled to the at least one anchor, and
- wherein the intermediate layer is absent under the moving mass, and
- wherein the at least one anchor that is coupled to the moving mass is formed below a surface of the semiconductor substrate.
Dependencies are inferred from the claim text.