Method for producing a microstructural element and microstructural element

A method for producing a microstructural element, comprising:

• providing a substrate,
• arranging an indentation structure in a first main surface region of the substrate,
• arranging a cover layer on the first main surface region and in the indentation structure of the substrate,
• applying a functional layer on the cover layer on the first main surface region and in the indentation structure of the substrate;
• planarizing the functional layer in order to acquire a planar first main surface region of the functional layer, wherein the functional layer at its opposite, second main surface region extends along the substrate and also into the indentation structure of the substrate and forms a reinforcement structure in the indentation structure;
• and
• exposing a movable functional region of the functional layer at least by removing the substrate in regions below the movable functional region, wherein the reinforcement structure is arranged at least partly in an anchoring region of the functional layer on the substrate, and wherein the functional layer without the reinforcement structure comprises a first thickness d1 and the functional layer with the reinforcement structure comprises a greater, second thickness d2, with d2>d1.