H10W 10/014
Using trench refilling with dielectric materials
Official title: {using trench refilling with dielectric materials, e.g. shallow trench isolations}
H10W10/014 (Using trench refilling with dielectric materials) appears on 11,122 US grants and 11,178 published applications in this corpus.
Search patents in H10W- Granted patents
- 11,122
- Published applications
- 11,178
- Assignees
- 928
- Inventors
- 13,649
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 10 | 0 |
| 1977 | 6 | 0 |
| 1978 | 8 | 0 |
| 1979 | 5 | 0 |
| 1980 | 9 | 0 |
| 1981 | 13 | 0 |
| 1982 | 10 | 0 |
| 1983 | 13 | 0 |
| 1984 | 14 | 0 |
| 1985 | 33 | 0 |
| 1986 | 33 | 0 |
| 1987 | 30 | 0 |
| 1988 | 19 | 0 |
| 1989 | 29 | 0 |
| 1990 | 24 | 0 |
| 1991 | 28 | 0 |
| 1992 | 45 | 0 |
| 1993 | 46 | 0 |
| 1994 | 35 | 0 |
| 1995 | 48 | 0 |
| 1996 | 38 | 0 |
| 1997 | 51 | 0 |
| 1998 | 105 | 0 |
| 1999 | 207 | 0 |
| 2000 | 285 | 0 |
| 2001 | 398 | 134 |
| 2002 | 314 | 344 |
| 2003 | 328 | 278 |
| 2004 | 297 | 351 |
| 2005 | 259 | 364 |
| 2006 | 259 | 319 |
| 2007 | 208 | 326 |
| 2008 | 204 | 333 |
| 2009 | 177 | 305 |
| 2010 | 256 | 257 |
| 2011 | 265 | 276 |
| 2012 | 218 | 373 |
| 2013 | 308 | 403 |
| 2014 | 432 | 473 |
| 2015 | 499 | 665 |
| 2016 | 621 | 619 |
| 2017 | 622 | 499 |
| 2018 | 565 | 556 |
| 2019 | 588 | 627 |
| 2020 | 595 | 689 |
| 2021 | 580 | 638 |
| 2022 | 459 | 580 |
| 2023 | 460 | 535 |
| 2024 | 429 | 475 |
| 2025 | 401 | 495 |
| 2026 | 236 | 264 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H10W 10/0145Of trenches having shapes other than rectangular or v-shape1,952
- H10W 10/0143Comprising concurrently refilling multiple trenches having different shapes or dimensions1,900
- H10W 10/0148Comprising introducing impurities in side walls or bottom walls of trenches714
- H10W 10/0142The dielectric materials being chemical transformed from non-dielectric materials165
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