H01J 2237/202
Movement
H01J2237/202 (Movement) appears on 1,480 US grants and 1,812 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,480
- Published applications
- 1,812
- Assignees
- 398
- Inventors
- 3,287
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 12 | 0 |
| 1994 | 6 | 0 |
| 1995 | 4 | 0 |
| 1996 | 5 | 0 |
| 1997 | 7 | 0 |
| 1998 | 12 | 0 |
| 1999 | 8 | 0 |
| 2000 | 10 | 0 |
| 2001 | 10 | 6 |
| 2002 | 9 | 34 |
| 2003 | 23 | 25 |
| 2004 | 30 | 32 |
| 2005 | 37 | 42 |
| 2006 | 36 | 32 |
| 2007 | 33 | 56 |
| 2008 | 40 | 56 |
| 2009 | 35 | 56 |
| 2010 | 41 | 38 |
| 2011 | 40 | 48 |
| 2012 | 34 | 39 |
| 2013 | 44 | 43 |
| 2014 | 40 | 60 |
| 2015 | 53 | 89 |
| 2016 | 62 | 82 |
| 2017 | 73 | 80 |
| 2018 | 70 | 64 |
| 2019 | 76 | 126 |
| 2020 | 105 | 131 |
| 2021 | 90 | 132 |
| 2022 | 97 | 140 |
| 2023 | 84 | 125 |
| 2024 | 87 | 104 |
| 2025 | 93 | 102 |
| 2026 | 69 | 70 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 2237/20221TranslationIndexing code585
- H01J 2237/20214RotationIndexing code359
- H01J 2237/20207TiltIndexing code247
- H01J 2237/20278Motorised movementIndexing code244
- H01J 2237/20292Means for position and/or orientation registrationIndexing code177
- H01J 2237/20264Piezoelectric devicesIndexing code53
- H01J 2237/20242Eucentric movementIndexing code16
- H01J 2237/2025Sensing velocity of translation or rotationIndexing code12
Recent patents
- System and method for fully integrated microcrystal electron diffraction (MicroED)6 Oct 2026US 12,755,925 B2The Regents of the University of California
- Enhanced dry desmear equipment with protective film peeling capability for integrated circuits29 Sep 2026US 12,749,660 B2Intel Corporation
- In-situ back side plasma treatment for residue removal from substrates29 Sep 2026US 12,749,661 B2Lam Research Corporation
- Sample holder and analysis system22 Sep 2026US 12,744,179 B2Hitachi High-Tech Corporation
- High selectivity, low stress, and low hydrogen carbon hardmasks in low-pressure conditions with wide gap electrode spacing15 Sep 2026US 12,735,785 B2Lam Research Corporation
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Shadow ring for substrate bond protection in plasma etch chamber17 Sep 2026US 2026/0279739 A1APPLIED Materials.Inc.
- Method to correct wafer placement for channel implant17 Sep 2026US 2026/0282839 A1
Most cited
By later US patents
- Method of detecting defects in patterned substrates227US 6,252,412 B1Schlumberger Technologies, Inc. · 2001
- Method for separating specimen and method for analyzing the specimen separated by the specimen separating method131US 5,270,552 AHitachi, Ltd. · 1993
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Semiconductor device tester which measures information related to a structure of a sample in a depth direction96US 6,768,324 B1Fab Solutions, Inc. · 2004
- Ion sources, systems and methods93US 7,554,096 B2ALIS Corporation · 2009