H01J 2237/20
Positioning, supporting, modifying or maintaining the physical state of objects being observed
Official title: Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
H01J2237/20 (Positioning, supporting, modifying or maintaining the physical state of objects being observed) appears on 3,130 US grants and 3,989 published applications in this corpus.
Search patents in H01J- Granted patents
- 3,130
- Published applications
- 3,989
- Assignees
- 807
- Inventors
- 6,880
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 3 | 0 |
| 1985 | 3 | 0 |
| 1986 | 5 | 0 |
| 1987 | 1 | 0 |
| 1988 | 3 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 3 | 0 |
| 1992 | 7 | 0 |
| 1993 | 28 | 0 |
| 1994 | 19 | 0 |
| 1995 | 19 | 0 |
| 1996 | 25 | 0 |
| 1997 | 23 | 0 |
| 1998 | 30 | 0 |
| 1999 | 25 | 0 |
| 2000 | 29 | 0 |
| 2001 | 30 | 15 |
| 2002 | 37 | 60 |
| 2003 | 49 | 49 |
| 2004 | 57 | 71 |
| 2005 | 57 | 85 |
| 2006 | 59 | 89 |
| 2007 | 54 | 125 |
| 2008 | 67 | 144 |
| 2009 | 72 | 131 |
| 2010 | 92 | 130 |
| 2011 | 91 | 118 |
| 2012 | 93 | 102 |
| 2013 | 106 | 106 |
| 2014 | 118 | 124 |
| 2015 | 111 | 170 |
| 2016 | 126 | 148 |
| 2017 | 134 | 142 |
| 2018 | 124 | 130 |
| 2019 | 129 | 185 |
| 2020 | 176 | 237 |
| 2021 | 145 | 267 |
| 2022 | 180 | 300 |
| 2023 | 165 | 312 |
| 2024 | 201 | 280 |
| 2025 | 242 | 290 |
| 2026 | 181 | 179 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 2237/202MovementIndexing code1,480
- H01J 2237/2007Holding mechanismsIndexing code665
- H01J 2237/2001Maintaining constant desired temperatureIndexing code633
- H01J 2237/2002Controlling environment of sampleIndexing code301
- H01J 2237/204Means for introducing and/or outputting objectsIndexing code252
- H01J 2237/206Modifying objects while observingIndexing code205
- H01J 2237/201For mounting multiple objectsIndexing code137
- H01J 2237/208Elements or methods for movement independent of sample stage for influencing orIndexing code129
Recent patents
- System and method for fully integrated microcrystal electron diffraction (MicroED)6 Oct 2026US 12,755,925 B2The Regents of the University of California
- External cooling assembly for substrate support6 Oct 2026US 12,755,943 B2APPLIED Materials.Inc.
- Electrostatically secured substrate support assembly6 Oct 2026US 12,755,944 B2APPLIED Materials.Inc.
- Method for etching an etch layer6 Oct 2026US 12,757,660 B2Lam Research Corporation
- Substrate fixing device6 Oct 2026US 12,757,684 B2Shinko Electric Industries Co., Ltd.
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Integration of vapor deposition process into plasma etch reactor8 Oct 2026US 2026/0311972 A1Lam Research Corporation
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Porous plug assembly, electrostatic chuck, and plasma etching apparatus1 Oct 2026US 2026/0305249 A1Advanced Micro-Fabrication Equipment Inc. China
- Temperature control member and electrostatic chuck device1 Oct 2026US 2026/0305250 A1Sumitomo Osaka Cement Co., Ltd.
Most cited
By later US patents
- Thermally floating pedestal collar in a chemical vapor deposition chamber805US 5,846,332 AAPPLIED Materials.Inc. · 1998
- Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support659US 6,847,014 B1Lam Research Corporation · 2005
- Apparatus for substrate processing with improved throughput and yield568US 6,129,044 AAPPLIED Materials.Inc. · 2000
- Low temperature CVD process with selected stress of the CVD layer on CMOS devices559US 7,393,765 B2APPLIED Materials.Inc. · 2008
- Lateral temperature equalizing system for large area surfaces during processing550US 7,195,693 B2Advanced Thermal Sciences Corp. · 2007