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US 12,755,944 B2Granted
Electrostatically secured substrate support assembly
AssigneeApplied Materials, Inc.
InventorArvinder Manmohan Singh Chadha
Life of this patent
Estimating the term…
Abstract
A substrate support assembly includes a cooling plate. The substrate support assembly further includes a chuck disposed on the cooling plate. The chuck includes one or more clamp electrodes to electrostatically secure the chuck to the cooling plate. The substrate support assembly further includes multiple mesas formed on a bottom surface of the chuck or formed on a top surface of the cooling plate to separate the chuck from the cooling plate.
Claims20
A substrate support assembly, comprising:
- a cooling plate;
- and
- a chuck disposed on the cooling plate, the chuck comprising one or more clamp electrodes to electrostatically secure the chuck to the cooling plate;
- and
- multiple first mesas formed on a bottom surface of the chuck or formed on a top surface of the cooling plate to separate the chuck from the cooling plate.
2 more elements
A substrate support assembly, comprising:
- a cooling plate forming a void on a top surface of the cooling plate;
- a chuck disposed on the cooling plate, the chuck comprising:
- one or more clamp electrodes to electrostatically secure the chuck to the cooling plate;
- and
- a metal disc disposed within the void and between the cooling plate and the chuck, wherein the metal disc comprises a protective coating on at least one surface of the metal disc.
2 more elements
A substrate support assembly, comprising:
- a cooling plate;
- a chuck disposed on the cooling plate, the chuck comprising:
- one or more clamp electrodes to electrostatically secure the chuck to the cooling plate;
- and
- one or more ring-shaped protrusions extending from a bottom surface of the chuck, wherein the one or more ring-shaped protrusions are configured to interface with one or more corresponding grooves formed in a top surface of the cooling plate, and wherein the one or more ring-shaped protrusions and the one or more corresponding grooves form a labyrinth seal between the cooling plate and the chuck.
2 more elements
Dependencies are inferred from the claim text.