External cooling assembly for substrate support
AssigneeApplied Materials, Inc.
InventorsDinkesh Huderi Somanna, Dan Deyo
Life of this patent
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Abstract
Embodiments of cooling assemblies for substrate supports are provided herein. In some embodiments, a cooling assembly for a substrate support includes a pedestal having a substrate supporting surface and a backside opposite the substrate supporting surface; and a cooling assembly coupled to the pedestal and configured to provide cooling gas to the backside of the pedestal, wherein the cooling assembly includes: a cooling member having a cooling channel disposed therein; an inlet extending from the cooling channel to an outer surface of the cooling member; and a one or more outlets extending from the cooling channel to an upper surface of the cooling member.
Claims12
A substrate support, comprising:
- a pedestal having a substrate supporting surface and a backside opposite the substrate supporting surface;
- and
- a cooling assembly coupled to the pedestal and configured to provide cooling gas toward the backside of the pedestal, wherein the cooling assembly includes:
- a first hub component, comprising a first cooling member that is arcuate in shape and having a first cooling channel disposed therein that is fluidly coupled to a first inlet that extends to an outer surface of the first cooling member, and one or more first outlets extending from the first cooling channel to an upper surface of the first cooling member configured to direct the cooling gas to a region above the first cooling member and proximate a radially outermost sidewall of the pedestal;
- a second hub component, comprising a second cooling member that is arcuate in shape and having a second cooling channel disposed therein that is fluidly coupled to a second inlet that extends to an outer surface of the second cooling member;
- and one or more second outlets extending from the second cooling channel to an upper surface of the second cooling member configured to direct the cooling gas to a region above the cooling member and proximate the radially outermost sidewall of the pedestal, wherein the first cooling member and the second cooling member each extend about 180 degrees about a central axis of the cooling assembly;
- and
- a plurality of posts extending from the first cooling member and the second cooling member and disposed in a circular array, wherein the one or more first outlets and the one or more second outlets extend through respective ones of the plurality of posts;
- wherein when the second hub component is placed adjacent the first hub component, the first cooling member is vertically aligned with the second cooling member so that the cooling assembly is annular, wherein the one or more first outlets and the one or more second outlets are disposed along the circular array that is disposed radially outward of the radially outermost sidewall of the pedestal;
- a first bracket coupled to the first cooling member, wherein the first bracket includes a first arcuate lower plate coupled to the first cooling member via a first arm, and wherein the first arcuate lower plate includes a first fastener opening;
- and
- a second bracket coupled to the second cooling member, wherein the second bracket includes a second arcuate lower plate coupled to the second cooling member via a second arm, and wherein the second arcuate lower plate includes a second fastener opening.
Dependencies are inferred from the claim text.