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US 2026/0305250 A1Published application
Temperature control member and electrostatic chuck device
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsMegumi OOTOMO, Nobuhiro HIDAKA, Kenta YASUNO
Life of this patent
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Abstract
Provided is a temperature control member that is formed of a conductive ceramic as a forming material, including a flow channel through which a heat medium flows, in which the conductive ceramic is formed of a high thermal conductive material and a conductive material, and a volume ratio between the high thermal conductive material and the conductive material is 10:90 to 90:10, and a thermal expansion coefficient of the conductive ceramic at 800° C. is 10×10−6/K or lower.
Claims6
A temperature control member that is formed of a conductive ceramic as a forming material, comprising:
- a flow channel through which a heat medium flows,
- wherein the conductive ceramic is formed of a high thermal conductive material and a conductive material, and a volume ratio between the high thermal conductive material and the conductive material is 10:90 to 90:10, and
- a thermal expansion coefficient of the conductive ceramic at 800° C. is 10×10−6/K or lower.
Dependencies are inferred from the claim text.