Sample holder and analysis system

A sample holder used in a charged particle beam device, comprising:

• a holder shaft that extends in a first direction;
• a placement unit that is provided at a distal end of the holder shaft and on which a sample is placeable;
• a moving mechanism that moves the holder shaft in the first direction;
• a rotating mechanism that rotates the holder shaft in a first rotation direction with a center of the holder shaft in a cross-sectional view perpendicular to the first direction as a rotation axis;
• a protrusion unit that is fixed to the holder shaft so as to protrude in a second direction intersecting the first direction and whose position is changed according to the rotation and movement of the holder shaft;
• and
• a guide unit that surrounds an outer periphery of the holder shaft in the first rotation direction and whose position is not changed according to the rotation and movement of the holder shaft, wherein
• the guide unit is provided with a first through hole and a second through hole communicating with the first through hole,
• a width of the first through hole in the first rotation direction is larger than a width of the second through hole in the first rotation direction,
• the protrusion unit is movable inside the first through hole and inside the second through hole,
• the sample holder includes a sensor that detects a position of the protrusion unit, and
• it is possible to calculate a rotational state of the holder shaft from the position of the protrusion unit detected by the sensor.