H01J 2237/20278
Motorised movement
H01J2237/20278 (Motorised movement) appears on 244 US grants and 299 published applications in this corpus.
Search patents in H01J- Granted patents
- 244
- Published applications
- 299
- Assignees
- 100
- Inventors
- 631
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 3 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 2 | 0 |
| 1997 | 4 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 1 | 1 |
| 2002 | 0 | 5 |
| 2003 | 3 | 5 |
| 2004 | 5 | 7 |
| 2005 | 6 | 2 |
| 2006 | 3 | 6 |
| 2007 | 4 | 4 |
| 2008 | 6 | 7 |
| 2009 | 1 | 6 |
| 2010 | 3 | 4 |
| 2011 | 4 | 5 |
| 2012 | 5 | 5 |
| 2013 | 4 | 7 |
| 2014 | 8 | 8 |
| 2015 | 13 | 18 |
| 2016 | 7 | 12 |
| 2017 | 11 | 13 |
| 2018 | 16 | 11 |
| 2019 | 8 | 24 |
| 2020 | 21 | 28 |
| 2021 | 21 | 21 |
| 2022 | 23 | 25 |
| 2023 | 11 | 34 |
| 2024 | 8 | 16 |
| 2025 | 17 | 7 |
| 2026 | 13 | 18 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Charged particle beam device15 Sep 2026US 12,738,448 B2Hitachi High-Tech Corporation
- Positioning system18 Aug 2026US 12,710,438 B2Applied Materials Israel Ltd.
- Substrate treating apparatus and substrate treating method18 Aug 2026US 12,712,163 B2Semes Co., Ltd.
- Target processing device and target processing method7 Jul 2026US 12,676,292 B2Kioxia Corporation
- Tilting element of manipulation stage30 Jun 2026US 12,671,055 B2Tescan Group A.S.
- Method to correct wafer placement for channel implant17 Sep 2026US 2026/0282839 A1
- Multipole magnet adjustment system and multipole magnet adjustment method13 Aug 2026US 2026/0237591 A1Kabushiki Kaisha Toshiba
- Charged Particle Beam Device and Method for Producing and Observing Sample Piece6 Aug 2026US 2026/0229446 A1Hitachi High-Tech Corporation
- Conveying Method, Conveyance Device, and Analysis System30 Jul 2026US 2026/0221378 A1Hitachi High-Tech Corporation
- Ion implanter9 Jul 2026US 2026/0198260 A1Nissin Ion Equipment Co., Ltd.
Most cited
By later US patents
- Stage device and pattern transfer system using the same78US 5,684,856 ACanon Kabushiki Kaisha · 1997
- Low-inertia multi-axis multi-directional mechanically scanned ion implantation system78US 8,227,768 B2Axcelis Technologies, Inc. · 2012
- Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device76US 5,260,580 ACanon Kabushiki Kaisha · 1993
- Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus49US 5,841,250 ACanon Kabushiki Kaisha · 1998
- Six-degree-of-freedom multi-axes positioning apparatus32US 5,901,936 ASandia Corporation · 1999