Conveying Method, Conveyance Device, and Analysis System

A conveying method for conveying a mesh on which a sample to be analyzed using a charged particle beam device is to be mounted, the conveying method comprising:

• (a) a step of picking up and holding the mesh placed on a first placement table by a first conveying unit;
• (b) a step of capturing an image of the mesh held by the first conveying unit using a first imaging unit after the step (a);
• (c) a step of correcting a position or an angle of the mesh based on a first image acquired in the step (b);
• and
• (d) a step of mounting the mesh on a mesh holder by the first conveying unit after the step (c), wherein
• in the step (d), the mesh held by the first conveying unit is fixed to the mesh holder in a state in which the mesh is in contact with a mounting surface of the mesh holder, which is a surface on which the mesh is to be mounted.

A conveyance device comprising:

• a placement table on which a mesh on which a sample to be analyzed using a charged particle beam device is to be mounted is placeable;
• a mesh holder on which the mesh is mountable;
• a first conveying unit configured to convey the mesh between the placement table and the mesh holder;
• a first imaging unit configured to capture an image of the mesh held by the first conveying unit;
• and
• a control unit configured to correct a position or an angle of the mesh based on a first image acquired by the first imaging unit, wherein
• the mesh holder includes a main body and a mesh retainer operable in a direction perpendicular to a mounting surface of the main body, which is a surface on which the mesh is to be mounted, and
• the mesh holder sandwiches the mesh by moving the mesh retainer to a mounting surface side in a state in which the mesh held by the first conveying unit is in contact with the mounting surface, thereby fixing the mesh to the mesh holder.