Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus

A stage apparatus comprising:

• a stage movable in a predetermined direction;
• stage accelerating/decelerating thrust generation means arranged along the moving direction;
• stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;
• accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;
• decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means;
• and
• speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval,
• wherein each of said stage accelerating/decelerating thrust generation means and said stage speed control thrust generation means comprises a linear motor whose movable unit has a magnet with its two poles opposing coils of a fixed unit and separated from each other by at least a maximum stroke distance of said stage, and said fixed unit comprises a yoke for applying a predetermined magnetic field to part of said coils in accordance with a position of said magnet over an entire stroke of said stage, and, as said coils, two sets of a single-phase speed control coil wound on said yoke and a plurality of polyphase accelerating/decelerating coils, which two sets of coils are separated from each other by a distance substantially equal to a pole-to-pole distance of said magnet.

A stage apparatus comprising:

• a stage movable in a predetermined direction;
• stage accelerating/decelerating thrust generation means arranged along the moving direction;
• stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;
• accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;
• decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means;
• speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval;
• and
• position detection means for detecting a position of said stage, command means for outputting a current command on the basis of a current position of said stage, which is detected by said position detection means, and a target position of said stage, a PWM accelerating power amplifier and a PWM decelerating power amplifier each of which outputs a current corresponding to the current command, switch means for connecting an output from said accelerating power amplifier to said accelerating means and an output from said decelerating power amplifier to said decelerating means, and a linear speed control power amplifier for outputting a current corresponding to said current command to drive said stage speed control thrust generation means.

A stage apparatus comprising:

• position detection means for detecting a position of a stage;
• command means for outputting a current command on the basis of a current position of said stage, which is detected by said position detection means, and a target position of said stage;
• a first power amplifier of a PWM type;
• first driving means for driving said stage in accordance with an output current from said first power amplifier;
• a second power amplifier of a linear type;
• and
• second driving means for driving said stage in accordance with an output current from said second power amplifier,
• wherein said first and second driving means are arranged to be parallel to each other.

A scanning exposure apparatus using, as a reticle stage, a stage apparatus, said stage apparatus comprising:

• a stage movable in a predetermined direction;
• stage accelerating/decelerating thrust generation means arranged along the moving direction;
• stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;
• accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;
• decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means;
• and
• speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval.

A device production method comprising producing a device by using a scanning exposure apparatus using, as a reticle stage, a stage apparatus, said stage apparatus comprising:

• a stage movable in a predetermined direction;
• stage accelerating/decelerating thrust generation means arranged along the moving direction;
• stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;
• accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;
• decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means;
• and
• speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval.