Multipole magnet adjustment system and multipole magnet adjustment method

A multipole magnet adjustment method using:

• (a) an X-axis drive motor configured to move a multipole magnet in an X-axis direction orthogonal to a traveling direction of the charged particle beam, the a multipole magnet being configured to control a charged particle beam;
• (b) a Y-axis drive motor configured to move the multipole magnet in a Y-axis direction orthogonal to both the traveling direction and the X-axis direction;
• and (c) a computer,
• the multipole magnet adjustment method comprising steps of:
• causing the computer to control the X-axis drive motor and the Y-axis drive motor;
• causing the computer to display a schematic image on a screen, the schematic image indicating a positional relationship between a vacuum duct and the multipole magnet surrounding the vacuum duct, the vacuum duct being a duct through which the charged particle beam passes;
• and
• causing the computer to move a displayed position of the multipole magnet on the screen in response to movement of the multipole magnet caused by driving of the X-axis drive motor and the Y-axis drive motor.