Substrate treating apparatus and substrate treating method

A substrate treating apparatus comprising:

• a chamber having an entrance for taking in and taking out a substrate at a side wall and having an opposite sidewall including a transparent material;
• a support chuck provided inside of the chamber and supporting the substrate;
• a first camera module for imaging the substrate configured to be taken in by a transfer robot through the entrance,
• wherein the first camera module is installed outside of the chamber and positioned to face the opposite sidewall of the chamber and is configured for imaging the entrance of the chamber through the transparent material of the opposite sidewall;
• and
• a controller configured to control a position of the transfer robot based on image data from the first camera module, wherein the controller comprises:
• a first controller calculating a position data of the transfer robot;
• and
• a second controller controlling the transfer robot based on the position data of the transfer robot from the first controller,
• wherein the first camera module generates a first image data by imaging the substrate which is being passed through the entrance from outside the entrance, and
• the first controller receives the first image data in real time from the first camera module to generate a first position data of the transfer robot so the substrate passes through the entrance,
• wherein the entrance includes a first apex to a fourth apex adjacent to each other defining a passage for the substrate,
• the substrate includes a first end point, and a second end point positioned opposite to the first end point,
• the first controller identifies the first apex to the fourth apex of the entrance and the first end point and the second end point of the substrate from the first image data,
• the first controller generates the first position data of the transfer robot so the first end point and the second end point of the substrate are positioned within the passage defined by the first apex to the fourth apex of the entrance, and
• the second controller controls the position of the transfer robot by receiving the first position data from the first controller in real time.