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US 5,684,856 AGranted
Stage device and pattern transfer system using the same
AssigneeCanon Kabushiki Kaisha
InventorsHirohito Itoh, Shinji Ohishi, Kazunori Iwamoto, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano, Satoru Takahashi
Life of this patent
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Abstract
A stage device includes a first, fine-motion driving system for moving a movable stage through a first range; and a second, relatively rough-motion driving system for moving the movable stage through a second range which is substantially of the same extent as the first range.
Claims16
A stage device, comprising:
- first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction;
- and
- second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range.
An exposure system including a stage device, comprising:
- first, fine-motion driving means, comprising a linear motor, for moving a movable stage through a first range in a predetermined direction;
- second, relatively rough-motion driving means for moving the movable stage through a second range in the predetermined direction, which is substantially of the same extent as the first range;
- and
- means for exposing a substrate placed on the movable stage with radiation energy generated by one of an X-ray source and an excimer laser source.
1 more element
Dependencies are inferred from the claim text.