Charged particle beam device

A sample holder comprising:

• an inclination mechanism driving unit configured to generate a driving force;
• an inclination driving force transmission unit configured to transmit the driving force;
• and
• an inclination mechanism unit configured to perform an inclination operation, wherein
• the inclination mechanism unit includes
• a first load transmission unit and a second load transmission unit configured to transmit a load from the inclination driving force transmission unit,
• a first deformation unit, a second deformation unit, a third deformation unit, and a fourth deformation unit configured to be elastically deformed by the load, and
• a sample holding unit configured to hold and incline a sample,
• the first deformation unit, the second deformation unit, and the third deformation unit are attached to the second load transmission unit,
• the third deformation unit is
• above the first deformation unit and the fourth deformation unit,
• below the second deformation unit,
• in front of the first deformation unit, and
• behind the fourth deformation unit,
• the first load transmission unit is configured to move in a load direction by the load from the inclination driving force transmission unit and transmit the load to the first deformation unit,
• the second load transmission unit is configured to rotate about the second deformation unit as a fulcrum by a torque generated by deformation of the first deformation unit and transmit the load to the third deformation unit, and
• the sample holding unit is configured to rotate about the fourth deformation unit as a fulcrum in a direction opposite to a direction of the second load transmission unit by a torque generated by deformation of the third deformation unit.

A sample insertion structure comprising:

• a sample holder;
• and
• a sample stage, wherein
• the sample holder includes
• an inclination mechanism driving unit configured to generate a driving force,
• an inclination driving force transmission unit configured to transmit the driving force, and
• an inclination mechanism unit configured to perform an inclination operation,
• the sample holder is configured to be inserted into the sample stage,
• the inclination mechanism unit includes
• a first load transmission unit and a second load transmission unit configured to transmit a load from the inclination driving force transmission unit,
• a first deformation unit, a second deformation unit, a third deformation unit, and a fourth deformation unit configured to be elastically deformed by the load, and
• a sample holding unit configured to hold and incline a sample,
• the first deformation unit, the second deformation unit, and the third deformation unit are attached to the second load transmission unit,
• the third deformation unit is
• above the first deformation unit and the fourth deformation unit,
• below the second deformation unit,
• in front of the first deformation unit, and
• behind the fourth deformation unit,
• the first load transmission unit is configured to move in a load direction by the load from the inclination driving force transmission unit and transmit the load to the first deformation unit,
• the second load transmission unit is configured to rotate about the second deformation unit as a fulcrum by a torque generated by deformation of the first deformation unit and transmit the load to the third deformation unit, and
• the sample holding unit is configured to rotate about the fourth deformation unit as a fulcrum in a direction opposite to a direction of the second load transmission unit by a torque generated by deformation of the third deformation unit.

A method of controlling a position of a sample using a sample holder, wherein

• the sample holder includes
• an inclination mechanism driving unit configured to generate a driving force,
• an inclination driving force transmission unit configured to transmit the driving force, and
• an inclination mechanism unit configured to perform an inclination operation,
• the inclination mechanism unit includes
• a first load transmission unit and a second load transmission unit configured to transmit a load from the inclination driving force transmission unit,
• a first deformation unit, a second deformation unit, a third deformation unit, and a fourth deformation unit configured to be elastically deformed by the load, and
• a sample holding unit configured to hold and incline a sample,
• the first deformation unit, the second deformation unit, and the third deformation unit are attached to the second load transmission unit,
• the third deformation unit is
• above the first deformation unit and the fourth deformation unit,
• below the second deformation unit,
• in front of the first deformation unit, and
• behind the fourth deformation unit,
• the method comprising:
• a step of moving the first load transmission unit in a load direction by the load from the inclination driving force transmission unit and transmitting the load to the first deformation unit;
• a step of rotating the second load transmission unit about the second deformation unit as a fulcrum by a torque generated by deformation of the first deformation unit and transmitting the load to the third deformation unit;
• and
• a step of rotating the sample holding unit about the fourth deformation unit as a fulcrum in a direction opposite to a direction of the second load transmission unit by a torque generated by deformation of the third deformation unit.